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Nanoelectromechanical bistable cantilever device

  • US 7,612,424 B1
  • Filed: 03/21/2006
  • Issued: 11/03/2009
  • Est. Priority Date: 07/22/2005
  • Status: Active Grant
First Claim
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1. Electromechanical device having an electrically conductive or semiconducting nano-cantilever wherein the nano-cantilever has a free end that is movable relative to an electrically conductive substrate of a circuit, a power source connected in the circuit for providing a voltage between the substrate and the nano-cantilever to effect bending movement of the nano-cantilever relative to the substrate, and a feedback control for varying the voltage between the substrate and the nano-cantilever in response to the position of the nano-cantilever relative to the substrate wherein two stable positions of the nano-cantilever and a hystersis loop in the current voltage space between a pull-in voltage and a pull-out voltage are provided.

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