Harmonic cMUT devices and fabrication methods
First Claim
1. A cMUT comprising:
- a membrane; and
a membrane frequency adjustor for adjusting a vibration mode of the membrane to a predetermined frequency.
1 Assignment
0 Petitions
Accused Products
Abstract
Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a harmonic cMUT device generally comprises a membrane having a non-uniform mass distribution. A mass load positioned along the membrane can be utilized to alter the mass distribution of the membrane. The mass load can be a part of the membrane and formed of the same material or a different material as the membrane. The mass load can be positioned to correspond with a vibration mode of the membrane, and also to adjust or shift a vibration mode of the membrane. The mass load can also be positioned at predetermined locations along the membrane to control the harmonic vibrations of the membrane. A cMUT can also comprise a cavity defined by the membrane, a first electrode proximate the membrane, and a second electrode proximate a substrate. Other embodiments are also claimed and described.
-
Citations
20 Claims
-
1. A cMUT comprising:
-
a membrane; and a membrane frequency adjustor for adjusting a vibration mode of the membrane to a predetermined frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A cMUT comprising:
-
a membrane; and a mass load proximate the membrane, wherein the mass load adapts the membrane to receive energy at a predetermined frequency. - View Dependent Claims (12, 13, 14, 15)
-
-
16. A cMUT for use with ultrasonic imaging, the cMUT comprising:
-
a membrane comprising a non-uniform mass distribution across its length such that at least one portion of the membrane has a mass distribution with a greater mass distribution than the remaining portions of the membrane; the portion of the membrane having a greater mass distribution including a mass load, the mass load configured to modify the frequency response of the membrane; a first electrode element and a second electrode element disposed within the membrane, the first electrode element and the second electrode elements configured to receive ultrasonic signals for transmission and to receive bias voltages for positioning the membrane for transmission and reception of ultrasonic waves; and a substrate defining a substrate surface set off from the membrane to define a cavity positioned beneath the membrane such that the membrane can fluctuate in the cavity at a frequency partially based on the mass load. - View Dependent Claims (17, 18, 19, 20)
-
Specification