MEMS acoustic filter and fabrication of the same
First Claim
Patent Images
1. A MEMS acoustic filter comprising:
- a MEMS resonator; and
at least two acoustic I/O ports.
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Abstract
A MEMS acoustic filter has a MEMS resonator and at least two acoustic I/O ports to alter an input acoustic signal to an output acoustic signal. The first I/O port is adapted for interfacing with a medium, and the second I/O port for passing an acoustic signal to an acoustic transducer. Multiple MEMS resonators may be stacked to form a high order acoustic filter. An array of MEMS acoustic filters may be designed to function as an acoustic lens. The MEMS acoustic filter is particularly useful with an ultrasonic transducer, such as PZT and MUT. Fabrication methods to make the same are also disclosed.
71 Citations
34 Claims
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1. A MEMS acoustic filter comprising:
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a MEMS resonator; and at least two acoustic I/O ports. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An ultrasonic transducer comprising:
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an ultrasonic transducer element; and a MEMS acoustic filter attached to the ultrasonic transducer element. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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24. An ultrasonic transducer array comprising:
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an array of ultrasonic transducer elements; and an array of MEMS acoustic filters each attached to a respective one of the array of ultrasonic transducer elements. - View Dependent Claims (25, 26, 27)
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28. A MEMS acoustic filter comprising:
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a MEMS resonator including a flexible membrane layer, a least one connector, and a base layer, wherein a bottom surface of the flexible membrane layer is connected to the base layer through the at least one connector; and at least two acoustic I/O ports. - View Dependent Claims (29, 30)
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31. A MEMS acoustic filter comprising:
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a MEMS resonator including a mass layer, a spring layer; and
a base layer, wherein the mass layer has a bottom surface connected to a top surface of the spring layer through a spring-mass connector, and the spring membrane is connected to the base layer; andat least two acoustic I/O ports. - View Dependent Claims (32, 33, 34)
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Specification