Semi-transmissive/semi-reflective electrode substrate, method for manufacturing same, and liquid crystal display using such semi-transmissive/semi-reflective electrode substrate
First Claim
1. A semi-transmitting and semi-reflecting electrode substrate comprising:
- a transparent substrate;
a transparent conductive layer which is disposed on said transparent substrate and contains indium oxide as its major component and further one or two or more oxides selected from tungsten oxide, molybdenum oxide and niobium oxide; and
a metal reflecting layer which is disposed on said transparent substrate, reflects extraneous light and is connected electrically with said transparent conductive layer,wherein the value of [In]/[All metals] that is a composition ratio of In in said transparent conductive layer containing indium oxide as its major component and further one or two or more oxides selected from tungsten oxide, molybdenum oxide and niobium oxide is 0.85 to 0.99.
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Accused Products
Abstract
Provided are a semi-transmitting and semi-reflecting electrode substrate provided with a transparent conductive layer which is almost free from the generation of residues caused by etching and is resistant to an etchant for a metal reflecting layer (metal layer), a method of producing the semi-transmitting and semi-reflecting electrode substrate and a liquid crystal display device using the semi-transmitting and semi-reflecting electrode substrate. Specifically, the invention relates a semi-transmitting and semi-reflecting electrode substrate comprising a transparent substrate, a transparent conductive layer which is disposed on the transparent substrate and contains indium oxide as its major component and further one or two or more oxides selected from tungsten oxide, molybdenum oxide and niobium oxide and a metal reflecting layer which is disposed on the transparent substrate, reflects extraneous light and is connected with the transparent conductive layer, to a method producing the semi-transmitting and semi-reflecting electrode substrate and to a liquid crystal display device using the semi-transmitting and semi-reflecting electrode substrate. This semi-transmitting and semi-reflecting electrode substrate is almost free from the generation of residues, has high processability and improves the yield.
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Citations
17 Claims
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1. A semi-transmitting and semi-reflecting electrode substrate comprising:
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a transparent substrate; a transparent conductive layer which is disposed on said transparent substrate and contains indium oxide as its major component and further one or two or more oxides selected from tungsten oxide, molybdenum oxide and niobium oxide; and a metal reflecting layer which is disposed on said transparent substrate, reflects extraneous light and is connected electrically with said transparent conductive layer, wherein the value of [In]/[All metals] that is a composition ratio of In in said transparent conductive layer containing indium oxide as its major component and further one or two or more oxides selected from tungsten oxide, molybdenum oxide and niobium oxide is 0.85 to 0.99. - View Dependent Claims (2, 5, 7)
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3. A semi-transmitting and semi-reflecting electrode substrate comprising:
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a transparent substrate; a transparent conductive layer which is disposed on said transparent substrate and contains indium oxide as its major component and further one or two or more oxides selected from tungsten oxide, molybdenum oxide and niobium oxide; a TFT element disposed on said transparent substrate; and a metal layer which is disposed on said transparent substrate and connects said transparent conductive layer electrically with said TFT element; wherein; said metal layer has a reflectance of 80% or more, wherein the value of [In]/[All metals] that is a composition ratio of In in said transparent conductive layer containing indium oxide as its major component and further one or two or more oxides selected from tungsten oxide, molybdenum oxide and niobium oxide is 0.85 to 0.99. - View Dependent Claims (4, 6)
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8. A semi-transmitting and semi-reflecting electrode substrate comprising:
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a transparent substrate; a transparent conductive layer which is disposed on said transparent substrate and contains indium oxide as its major component and further one or two or more oxides selected from lanthanoid-based metal oxides; and a metal reflecting layer which is disposed on said transparent substrate and is connected electrically with said transparent conductive layer, wherein the value of [In]/[All metals] that is a composition ratio of In in said transparent conductive layer containing indium oxide as its major component and further one or two or more oxides selected from lanthanoid-based metal oxides is 0.8 to 0.99. - View Dependent Claims (9, 10, 14, 16, 17)
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11. A semi-transmitting and semi-reflecting electrode substrate comprising:
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a transparent substrate; a transparent conductive layer which is disposed on said transparent substrate and contains indium oxide as its major component and further one or two or more oxides selected from lanthanoid-based metal oxides; a TFT element disposed on said transparent substrate; and a metal layer which is disposed on said transparent substrate and connects said transparent conductive layer electrically with said TFT element; wherein; said metal layer has a reflectance of 80% or more, wherein the value of [In]/[All metals] that is a composition ratio of In in said transparent conductive layer containing indium oxide as its major component and further one or two or more oxides selected from lanthanoid-based metal oxides is 0.8 to 0.99. - View Dependent Claims (12, 13, 15)
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Specification