Microelectromechanical device with optical function separated from mechanical and electrical function
First Claim
Patent Images
1. A microelectromechanical (MEMS) device comprising:
- a first reflective layer;
a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and
an actuation electrode between the deformable layer and the reflective element, wherein a voltage applied to the actuation electrode generates a first attractive force in a first direction on a first portion of the movable element and generates a second attractive force in a second direction on a second portion of the movable element, the second direction substantially opposite the first direction, the first attractive force greater than the second attractive force, the movable element responsive to the first and second attractive forces by moving generally in the first direction.
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Abstract
A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.
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Citations
36 Claims
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1. A microelectromechanical (MEMS) device comprising:
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a first reflective layer; a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and an actuation electrode between the deformable layer and the reflective element, wherein a voltage applied to the actuation electrode generates a first attractive force in a first direction on a first portion of the movable element and generates a second attractive force in a second direction on a second portion of the movable element, the second direction substantially opposite the first direction, the first attractive force greater than the second attractive force, the movable element responsive to the first and second attractive forces by moving generally in the first direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A microelectromechanical (MEMS) device comprising:
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a first reflective layer; a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and an actuation electrode between the deformable layer and the reflective element, wherein a lower surface of the deformable layer contacts a stationary portion of the device when an actuation voltage is applied to the actuation electrode. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A microelectromechanical (MEMS) device comprising:
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a first reflective layer; a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and an actuation electrode between the deformable layer and the reflective element, wherein an upper surface of the reflective element contacts a stationary portion of the device when an actuation voltage is applied to the actuation electrode. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification