Two mask floating gate EEPROM and method of making

• US 7,615,436 B2
• Filed: 05/20/2004
• Issued: 11/10/2009
• Est. Priority Date: 03/28/2001
• Status: Expired due to Term

• Current Assignee: Woden Technologies Inc. (Wi-LAN Inc.)
• Original Assignee: SanDisk 3D LLC (Western Digital Corporation)
• Inventors: Walker, Andrew J., Kouznetsov, Igor G.
• Primary Examiner(s): Pham; Long
• Application Number:
  US10/849,152
• Publication Number:
  US 20040207001A1
• Time in Patent Office: 2,000 Days
• Field of Search: 438/201, 438/211, 438/257, 438/261, 438/262, 438/263, 438/264, 257/E27.078, 257/E21.179
• US Class Current: 438/201
• CPC Class Codes: H01L 27/0688 Integrated circuits having a three-dimensional layout
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 29/42324 Gate electrodes for transistors with a floating gate
• CPC Class Codes: H01L 29/7881 Programmable transistors with only two possible levels of programmation H01L29/7888 takes precedence
• CPC Class Codes: H01L 29/792 with charge trapping gate insulator, e.g. MNOS-memory transistors
• CPC Class Codes: H01L 29/7926 Vertical transistors, i.e. transistors having source and drain not in the same horizontal plane
• CPC Class Codes: H01L 29/8616 Charge trapping diodes
• CPC Class Codes: H10B 20/00 Read-only memory [ROM] devices

Abstract

There is provided a floating gate transistor, such as an EEPROM transistor, and method of making the transistor using two masking steps. The method of making a transistor includes patterning a floating gate layer using a first photoresist mask to form a floating gate rail and doping an active area using the floating gate rail as a mask to form source and drain regions in the active area. The method also includes patterning a control gate layer, a control gate dielectric layer, the floating gate rail, a tunnel dielectric layer and the active area using a second photoresist mask to form a control gate, a control gate dielectric, a floating gate, a tunnel dielectric and a channel island region.

Claims

1. A method of making a floating gate transistor, comprising:

providing a semiconductor active area;

forming a tunnel dielectric layer over the active area;

forming a floating gate layer over the tunnel dielectric layer;

forming a first photoresist mask over the floating gate layer;

patterning the floating gate layer using the first photoresist mask to form a floating gate rail;

doping the active area using the floating gate rail as a mask to form source and drain regions in the active area;

forming an intergate insulating layer adjacent to lower portions of side surfaces of the floating gate rail;

forming a control gate dielectric layer over and adjacent to upper portions of the side surfaces of the floating gate rail;

forming a control gate layer over the control gate dielectric layer;

forming a second photoresist mask over the control gate layer; and

patterning the control gate layer, the control gate dielectric layer, the floating gate rail, the tunnel dielectric layer and the active area using the second photoresist mask to form a control gate, a control gate dielectric, a floating gate, a tunnel dielectric and a channel island region.

2. The method of claim 1, comprising forming the entire floating gate transistor using two photolithographic masking steps.

3. The method of claim 1, wherein forming an intergate insulating layer adjacent to the side surfaces of the floating gate rail comprises:

forming the intergate insulating layer over and adjacent to the floating gate rail; and

etching back the intergate insulating layer such that the intergate insulating layer remains adjacent to the lower portions of the floating gate rail side surfaces below the upper portions of the floating gate rail side surfaces.

4. The method of claim 3, further comprising:

forming a hardmask over the floating gate layer;

forming the first photoresist mask on the hardmask layer; and

patterning the hardmask layer and the floating gate layer using the first photoresist mask to form a first rail stack comprising a hardmask rail and the floating gate rail.

5. The method of claim 4, further comprising:

implanting lightly doped portions of the source and drain regions using the first rail stack as a mask;

forming sidewall spacers on the first rail stack;

implanting heavily doped portions of the source and drain regions using the first rail stack and the sidewall spacers as a mask;

forming a metal layer over the source and drain regions and over the first rail stack;

annealing the first metal layer to react the metal layer with the source and drain regions to selectively form metal silicide regions on the source and drain regions; and

selectively etching the unreacted metal layer remaining on the sidewall spacers and the first rail stack.

6. The method of claim 5, further comprising:

selectively removing the hardmask and sidewall spacers from upper portions of the floating gate rail;

forming the control gate dielectric layer on the upper portions of the side surfaces of the floating gate rail and on the top surface of the floating gate rail; and

forming the control gate layer on the control gate dielectric layer such that the control gate layer is located over the top surface of the floating gate rail and laterally adjacent to the upper portions of the side surfaces of the floating gate rail.

7. The method of claim 4, further comprising roughening the top surface and the upper portions of the side surfaces of the floating gate rail prior to forming the control gate dielectric layer.

8. The method of claim 4, wherein forming the source and drain regions comprises performing an angled implant using the first rail stack as a mask to form source and drain regions which are asymmetric with respect to the first rail stack.

9. The method of claim 8, wherein the angled implant comprises implanting heavily doped source and drain regions.

10. The method of claim 9, further comprising implanting a lightly doped portion of the source region perpendicular to the active area.

11. The method of claim 1, further comprising:

patterning the floating gate layer using the first photoresist mask to form a plurality of floating gate rails;

doping the active area using the floating gate rails as a mask to form a plurality of source and drain regions in the active area;

forming the intergate insulating layer between lower portions of the side surfaces of the floating gate rails;

forming the control gate dielectric layer and the control gate layer over and adjacent to upper portions of the side surfaces of the floating gate rails;

forming the second photoresist mask over the control gate layer; and

patterning the control gate layer, the control gate dielectric layer, the floating gate rails, the tunnel dielectric layer and the active area using the second photoresist mask to form a plurality of control gates, a plurality of control gate dielectrics, a plurality of floating gates, a plurality of tunnel dielectrics and a plurality of channel island regions.

12. The method of claim 11, wherein the intergate insulating layer protects the plurality of source and drain regions in the active area during the patterning of the floating gate rails and the active area.

13. The method of claim 11, further comprising forming an insulating fill layer between adjacent second rail stacks, wherein each second rail stack comprises one of the plurality of control gates, one the plurality of control gate dielectrics, one of the plurality of floating gates, one of the plurality of tunnel dielectrics and one of the plurality of channel island regions.

14. The method of claim 11, wherein forming an intergate insulating layer adjacent to the side surfaces of the floating gate rail comprises:

forming the intergate insulating layer over and adjacent to the floating gate rails; and

etching back the intergate insulating layer such that the intergate insulating layer remains between the floating gate rails, adjacent to the lower portions of the floating gate rail side surfaces below the upper portions of the floating gate rail side surfaces.

15. The method of claim 14, further comprising patterning the hardmask layer and the floating gate layer using the first photoresist mask to form a plurality of first rail stacks each comprising a hardmask rail and the floating gate rail.

16. The method of claim 15, further comprising:

implanting a plurality of lightly doped portions of the source and drain regions using the first rail stacks as a mask;

forming sidewall spacers on the first rail stacks;

implanting a plurality of heavily doped portions of the source and drain regions using the first rail stacks and the sidewall spacers as a mask;

forming a metal layer over the plurality of source and drain regions and over the first rail stacks;

annealing the first metal layer to react the metal layer with the plurality of source and drain regions to selectively form metal silicide regions on the plurality of source and drain regions; and

selectively etching the unreacted metal layer remaining on the sidewall spacers and the first rail stacks.

17. The method of claim 16, further comprising:

selectively removing the hardmask and sidewall spacers from upper portions of the floating gate rails;

forming the control gate dielectric layer on the upper portions of the side surfaces of the floating gate rails and on the top surface of the floating gate rails; and

forming the control gate layer on the control gate dielectric layer such that the control gate layer is located over the top surface of the floating gate rails and laterally adjacent to the upper portions of the side surfaces of the floating gate rails.

18. The method of claim 17, further comprising patterning the active area using a third mask to form a plurality of islands containing two EEPROM transistors sharing a common source to form a DuSNOR array.

19. The method of claim 17, further comprising patterning the active area using a third mask to form a plurality of islands containing one EEPROM transistor to form a SSL-NOR array with separated drain and source lines.

20. The method of claim 17, wherein:

the step of doping the active area further comprises forming a plurality of bit lines containing the plurality of source and drain regions, wherein the bit lines extend substantially perpendicular to a source-channel-drain direction;

the step of forming metal silicide regions comprises forming a metal silicide on the plurality of bit lines; and

the step of patterning the active area comprises etching the active area to form a plurality of channel island regions without etching the bit lines containing the source and drain regions which are covered by the intergate insulating layer.

21. The method of claim 1, wherein providing the semiconductor active area comprises forming a polysilicon active layer over an interlayer insulating layer.

22. The method of claim 21, wherein:

forming the tunnel dielectric layer over the active area comprises growing a thermal silicon oxide layer on the polysilicon active layer;

forming the floating gate layer over the tunnel dielectric layer comprises forming a polysilicon layer on the tunnel dielectric layer;

forming the first photoresist mask over the floating gate layer comprises forming the photoresist on a hardmask layer located on the floating gate layer;

patterning the floating gate layer using the first photoresist mask to form a floating gate rail comprises anisotropically etching the hardmask layer and the floating gate layer during one etching step using the first photoresist mask;

doping the active area using the floating gate rail as a mask to form source and drain regions in the active area comprises ion implanting the source and drain regions using the floating gate rail as a mask;

forming the intergate insulating layer adjacent to the side surfaces of the floating gate rail comprises forming the intergate insulating layer over and adjacent to the floating gate rail and etching back the intergate insulating layer such that the intergate insulating layer remains adjacent to the lower portions of the floating gate rail side surfaces below the upper portions of the floating gate rail side surfaces;

forming the control gate dielectric layer comprises growing a thermal silicon oxide layer on the floating gate rail, depositing a silicon nitride layer on the thermal silicon oxide layer and depositing a silicon oxide layer on the silicon nitride layer;

forming the control gate layer over the control gate dielectric layer comprises depositing a polysilicon layer and a silicide layer on the control gate dielectric layer;

forming the second photoresist mask over the control gate layer comprises forming the second photoresist mask on the control gate layer; and

patterning the control gate layer, the control gate dielectric layer, the floating gate rail, the tunnel dielectric layer and the active area using the second photoresist mask comprises anisotropically etching the control gate layer, the control gate dielectric layer, the floating gate rail, the tunnel dielectric layer and the active layer in one etching step to form second rail stacks.

23. The method of claim 11, further comprising:

forming an interlayer insulating layer below the active area;

forming at least one via extending through the interlayer insulating layer to a lower device level or to a driver circuit in a substrate;

depositing at least a portion of the control gate layer in the at least one via; and

patterning the control gate layer to form the plurality of control gates and an interlevel interconnect which connects the floating gate transistor with a device on a lower device level or with a driver circuit in the substrate.

24. The method of claim 23, further comprising:

forming a heavily doped polysilicon layer comprising a lower portion of the control gate layer;

forming the at least one via extending through the heavily doped polysilicon layer;

forming a conductive layer comprising an upper portion of the control gate layer on the heavily doped polysilicon layer and in the at least one via; and

patterning the heavily doped polysilicon layer and the conductive layer to form the plurality of control gates and the interlevel interconnect.

25. A method of forming a monolithic three dimensional memory array, comprising:

providing a first array of transistors of claim 11;

forming an interlayer insulating layer over the array; and

monolithically forming at least a second array of TFT EEPROMs on the interlayer insulating layer.

26. A method of forming a three dimensional memory array, comprising:

providing a plurality of arrays of transistors of claim 11 on different silicon on insulator substrates;

thinning the substrates; and

attaching the arrays to each other to form a three dimensional memory array.

27. A method of claim 8, further comprising:

programming the floating gate EEPROM transistor by Fowler-Nordheim electron tunneling from the floating gate to the drain region; and

erasing the floating gate EEPROM transistor by Fowler-Nordheim electron tunneling from the channel island region to the floating gate.

28. A method of forming an array of floating gate transistors, comprising:

forming at least portions of a plurality of floating gates over a tunnel dielectric located over a semiconductor active area;

wherein the step of forming the at least portions of the plurality of floating gates comprises;

providing the semiconductor active area;

forming a tunnel dielectric layer over the active area;

forming a floating gate layer over the tunnel dielectric layer;

forming a first photoresist mask over the floating gate layer and

patterning the floating gate layer using the first photoresist mask to form the plurality of the floating gate portions comprising floating gate rails;

doping the active area using the at least portions of the plurality of floating gates as a mask to form a plurality of bit lines in the active area;

wherein the step of doping the active area comprises;

doping the active area using the floating gate rails as a mask to form the plurality of bit lines containing transistor source and drain regions;

forming an intergate insulating layer between lower portions of side surfaces of the at least portions of the plurality of floating gates;

forming a control gate dielectric on exposed upper surfaces of the at least portions of the floating gates and on exposed upper portions of side surfaces of the at least portions of the floating gates; and

forming a plurality of word lines over the control dielectric and over the integrate insulating layer;

wherein the steps of forming the control gate dielectric and forming the plurality of word lines comprise;

forming a control gate dielectric layer and a control gate layer over and adjacent to upper portions of the side surfaces of the floating gate rails;

forming a second photoresist mask over the control gate layer; and

patterning the control gate layer, the control gate dielectric layer, the floating gate rails, the tunnel dielectric layer and the active area using the second photoresist mask to form the plurality of word lines containing transistor control gates, a plurality of control gate dielectrics, a plurality of floating gates, a plurality of tunnel dielectrics and a plurality of channel island regions.

29. The method of claim 28 wherein forming the intergate insulating layer comprises:

forming the intergate insulating layer over and adjacent to the floating gate rails; and

etching back the intergate insulating layer such that the intergate insulating layer remains between the floating gate rails, adjacent to the lower portions of the floating gate rail side surfaces below the upper portions of the floating gate rail side surfaces.

30. The method of claim 29, further comprising:

forming a hardmask layer over the floating gate layer; and

patterning the hardmask layer and the floating gate layer using the first photoresist mask to form a plurality of first rail stacks each comprising a hardmask rail and the floating gate rail.

31. The method of claim 30, further comprising forming an insulating fill layer between adjacent second rail stacks, wherein each second rail stack comprises one of the plurality of word lines, one the plurality of control gate dielectrics, one of the plurality of floating gates, one of the plurality of tunnel dielectrics and one of the plurality of channel island regions.

32. The method of claim 31, further comprising:

implanting a plurality of lightly doped portions of the source and drain regions using the first rail stacks as a mask;

forming sidewall spacers on the first rail stacks;

implanting a plurality of heavily doped portions of the source and drain regions using the first rail stacks and the sidewall spacers as a mask;

forming a metal layer over the plurality of bit lines, over the plurality of source and drain regions and over the first rail stacks;

annealing the first metal layer to react the metal layer with the plurality of bit lines and the plurality of source and drain regions to selectively form metal silicide regions on the plurality of bit lines and the plurality of source and drain regions; and

selectively etching the unreacted metal layer remaining on the sidewall spacers and the first rail stacks.

33. The method of claim 32, wherein:

providing the semiconductor active area comprises forming a polysilicon active layer over an interlayer insulating layer;

forming the tunnel dielectric layer over the active area comprises growing a thermal silicon oxide layer on the polysilicon active layer;

forming the floating gate layer over the tunnel dielectric layer comprises forming a polysilicon layer on the tunnel dielectric layer;

forming the first photoresist mask over the floating gate layer comprises forming the photoresist on the hardmask layer;

patterning the floating gate layer using the first photoresist mask to form a floating gate rail comprises anisotropically etching the hardmask layer and the floating gate layer during one etching step using the first photoresist mask;

forming the control gate dielectric layer comprises growing a thermal silicon oxide layer on the floating gate rail, depositing a silicon nitride layer on the thermal silicon oxide layer and depositing a silicon oxide layer on the silicon nitride layer;

forming the control gate layer over the control gate dielectric layer comprises depositing a polysilicon layer and a silicide layer on the control gate dielectric layer;

forming the second photoresist mask over the control gate layer comprises forming the second photoresist mask on the control gate layer; and

patterning the control gate layer, the control gate dielectric layer, the floating gate rail, the tunnel dielectric layer and the active area using the second photoresist mask comprises anisotropically etching the control gate layer, the control gate dielectric layer, the floating gate rail, the tunnel dielectric layer and the active layer in one etching step to form the second rail stacks.

34. A method of forming a monolithic three dimensional memory array, comprising:

providing a first array of floating gate EEPROM transistors of claim 28;

forming an interlayer insulating layer over the array; and

monolithically forming at least a second array of TFT EEPROMs on the interlayer insulating layer.

35. A method of forming a three dimensional memory array, comprising:

providing a plurality of arrays of floating gate EEPROM transistors of claim 28 on different silicon on insulator substrates;

thinning the substrates; and

attaching the arrays to each other to form a three dimensional memory array.

36. The method of claim 28 further comprising:

forming an interlayer insulating layer below the active area;

forming at least one via extending through the interlayer insulating layer to a lower device level or to a driver circuit in a substrate;

depositing at least a portion of a word line layer in the at least one via; and

patterning the word line layer to form the plurality of word lines and an interlevel interconnect which connects the array of transistors with a device on a lower device level or with a driver circuit in the substrate.

37. The method of claim 36 further comprising:

forming a heavily doped polysilicon layer comprising a lower portion of the word line layer;

forming the at least one via extending through the heavily doped polysilicon layer;

forming a conductive layer comprising an upper portion of the word line layer on the heavily doped polysilicon layer and in the at least one via; and

patterning the heavily doped polysilicon layer and the conductive layer to form the plurality of word lines and the interlevel interconnect.

42. The method of claim 28, wherein the step of forming the intergate insulating layer occurs after the step of doping the active area.

38. A method of making a floating gate transistor, comprising forming the entire floating gate transistor using two photolithographic masking steps wherein a channel island region and at least one of a control gate and a floating gate are etched using a same mask such that a semiconductor channel region of the floating gate transistor is formed in the etched channel island region, the method comprising:

providing a semiconductor active area;

forming a tunnel dielectric layer over the active area;

forming a floating gate layer over the tunnel dielectric layer;

forming a first photoresist mask over the floating gate layer in a first photolithographic masking step;

patterning the floating gate layer using the first photoresist mask to form a floating gate rail;

doping the active area using the floating gate rail as a mask to form source and drain regions in the active area;

forming an intergate insulating layer adjacent to lower portions of side surfaces of the floating gate rail;

forming a control gate dielectric layer over and adjacent to upper portions of the side surfaces of the floating gate rail;

forming a control gate layer over the control gate dielectric layer;

forming a second photoresist mask over the control gate layer in a second photolithographic masking step; and

patterning the control gate layer, the control gate dielectric layer, the floating gate rail, the tunnel dielectric layer and the active area using the second photoresist mask to form the control gate, a control gate dielectric, the floating gate, a tunnel dielectric and the channel island region.

39. The method of claim 38, wherein forming an intergate insulating layer adjacent to the side surfaces of the floating gate rail comprises:

forming the intergate insulating layer over and adjacent to the floating gate rail; and

etching back the intergate insulating layer such that the intergate insulating layer remains adjacent to the lower portions of the floating gate rail side surfaces below the upper portions of the floating gate rail side surfaces.

40. The method of claim 39, further comprising:

forming a hardmask over the floating gate layer;

forming the first photoresist mask on the hardmask layer;

patterning the hardmask layer and the floating gate layer using the first photoresist mask to form a first rail stack comprising a hardmask rail and the floating gate rail;

implanting lightly doped portions of the source and drain regions using the first rail stack as a mask;

forming sidewall spacers on the first rail stack;

implanting heavily doped portions of the source and drain regions using the first rail stack and the sidewall spacers as a mask;

forming a metal layer over the source and drain regions and over the first rail stack;

annealing the first metal layer to react the metal layer with the source and drain regions to selectively form metal silicide regions on the source and drain regions; and

selectively etching the unreacted metal layer remaining on the sidewall spacers and the first rail stack.

41. The method of claim 40 further comprising:

selectively removing the hardmask and sidewall spacers from upper portions of the floating gate rail;

forming the control gate dielectric layer on the upper portions of the side surfaces of the floating gate rail and on the top surface of the floating gate rail; and

forming the control gate layer on the control gate dielectric layer such that the control gate layer is located over the top surface of the floating gate rail and laterally adjacent to the upper portions of the side surfaces of the floating gate rail.