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Thin film transistor incorporating an integrated capacitor and pixel region

  • US 7,615,786 B2
  • Filed: 10/31/2007
  • Issued: 11/10/2009
  • Est. Priority Date: 10/01/1993
  • Status: Expired due to Fees
First Claim
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1. A display device comprising:

  • a substrate;

    a thin film transistor over the substrate, the thin film transistor comprising a semiconductor layer and a gate electrode adjacent to the semiconductor layer with a gate insulating film interposed therebetween;

    a wiring formed over the substrate;

    a first insulating film comprising a silicon nitride over the thin film transistor and the wiring;

    a second insulating film over the first insulating film, wherein the second insulating film has at least one opening over the wiring;

    a pixel electrode over the second insulating film, the pixel electrode being electrically connected to the thin film transistor, wherein the pixel electrode contacts an upper surface of the first insulating film in the opening of the second insulating film; and

    a capacitor comprising the wiring, the pixel electrode, and the first insulating film.

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