Film bulk acoustic resonator package and method of fabricating same
First Claim
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1. A microfabricated device, comprising:
- a first substrate;
a second substrate bonded to said first substrate to define a chamber;
a film bulk acoustic resonator (FBAR) device located on a surface of said first substrate inside said chamber;
an active circuit located on a surface of said second substrate inside said chamber; and
an electrical connection between said active circuit and said FBAR device, said electrical connection being configured to connect a signal between said FBAR device and said active circuit, and said active circuit being configured to process said signal.
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Abstract
A microfabricated device has a first substrate, a second substrate, a film bulk acoustic resonator (FBAR) device, and a circuit. The second substrate is bonded to the first substrate to define a chamber. The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection connects the circuit and the FBAR device.
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Citations
18 Claims
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1. A microfabricated device, comprising:
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a first substrate; a second substrate bonded to said first substrate to define a chamber; a film bulk acoustic resonator (FBAR) device located on a surface of said first substrate inside said chamber; an active circuit located on a surface of said second substrate inside said chamber; and an electrical connection between said active circuit and said FBAR device, said electrical connection being configured to connect a signal between said FBAR device and said active circuit, and said active circuit being configured to process said signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A microfabricated device, comprising:
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a first substrate; a second substrate bonded to said first substrate to define a chamber; a film bulk acoustic resonator (FBAR) device located on a surface of said first substrate inside said chamber, said FBAR device comprising a tunable FBAR circuit, said tunable FBAR circuit comprising a voltage variable capacitor electrically connected to the FBAR; an circuit located on a surface of said second substrate inside said chamber; and an electrical connection between said circuit and said FBAR device, wherein said circuit located on said surface of said second substrate comprises an operational amplifier, and wherein said tunable FBAR circuit is positioned within a feedback path of said operational amplifier.
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18. A microfabricated device, comprising:
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a first substrate; a second substrate bonded to the first substrate to define a chamber; a film bulk acoustic resonator (FBAR) device located over a surface of the first substrate inside the chamber; an active circuit located on a surface of the second substrate inside the chamber, the active circuit configured to process a signal from the FBAR device; and an electrical connection between the active circuit and the FBAR device, wherein electrical connection hermetically seals the chamber.
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Specification