Lithography device for semiconductor circuit pattern generation
First Claim
1. A lithography pattern generating device comprising:
- an array of cells arranged in rows and columns, the array being formed with at least one flexible dielectric layer, each cell being individually controlled to permit passage of charged particles from an external source; and
control logic for controlling each cell;
wherein each cell comprises an aperture for emitting the particles onto a surface to be exposed.
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Accused Products
Abstract
General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.
251 Citations
24 Claims
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1. A lithography pattern generating device comprising:
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an array of cells arranged in rows and columns, the array being formed with at least one flexible dielectric layer, each cell being individually controlled to permit passage of charged particles from an external source; and control logic for controlling each cell; wherein each cell comprises an aperture for emitting the particles onto a surface to be exposed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification