Device for controlling the frequency of resonance of an oscillating micro-electromechanical system
First Claim
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1. A device, comprising:
- a microstructure including a first body and a second body, said second body being capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, wherein a relative displacement between said second body and said first body is detectable;
an amplifier coupled to said microstructure for detecting said relative displacement;
a calibration circuit coupled to said microstructure for applying an electrostatic force between said first body and said second body so as to modify said frequency of resonance; and
DC decoupling elements arranged between said microstructure and said amplifier and arranged between said calibration circuit and said amplifier.
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Abstract
A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure, having a first body and a second body, which is capacitively coupled to the first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, a relative displacement between the second body and the first body being detectable from outside; and an amplifier coupled to the microstructure for detecting the relative displacement. DC decoupling elements are arranged between the amplifier and the microstructure.
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Citations
28 Claims
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1. A device, comprising:
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a microstructure including a first body and a second body, said second body being capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, wherein a relative displacement between said second body and said first body is detectable; an amplifier coupled to said microstructure for detecting said relative displacement; a calibration circuit coupled to said microstructure for applying an electrostatic force between said first body and said second body so as to modify said frequency of resonance; and DC decoupling elements arranged between said microstructure and said amplifier and arranged between said calibration circuit and said amplifier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An oscillating micro-electromechanical system comprising:
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a microstructure including a first body and a second body, said second body capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, wherein a relative displacement between said second body and said first body is detectable; an amplifier coupled to said microstructure for detecting said relative displacement; and means for controlling the frequency of resonance including means for decoupling the amplifier and the microstructure. - View Dependent Claims (13, 14)
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15. A method for controlling the frequency of resonance of a micro-electromechanical system comprising the steps of:
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setting in oscillation a microstructure including a first body, a second body, and capacitive-coupling elements, said second body capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance; generating a signal based on a relative displacement between said second body and said first body; amplifying said signal using an amplifier; DC decoupling said amplifier from said microstructure; supplying a common-mode voltage to said amplifier using a common-mode voltage source; alternatively connecting and disconnecting inputs of said amplifier and said common-mode voltage source; and alternatively connecting and disconnecting said capacitive-coupling elements and a shift voltage source of a calibration circuit, the calibration circuit coupled to said microstructure for applying an electrostatic force between said first body and said second body so as to modify said frequency of resonance. - View Dependent Claims (16, 17)
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18. A MEMS system having a controllable resonance frequency, comprising:
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a microstructure for generating a signal at a resonance frequency, the microstructure including a stator having a plurality of fixed electrodes, and a moveable body oscillatably coupled to the stator via mechanical elements and having a plurality of movable electrodes capacitively coupled to the plurality of fixed electrodes; a shift voltage source electrically coupled to the plurality of fixed electrodes for adjusting the resonance frequency; an amplifier having an input electrically coupled to the plurality of fixed electrodes for receiving the signal at the resonance frequency; a DC decoupling capacitor having a first terminal and a second terminal, the first terminal being coupled to the amplifier input and the second terminal being coupled to the shift voltage source; and a common-mode voltage source coupled to the amplifier input and the first terminal of the at least one DC decoupling capacitor. - View Dependent Claims (19, 20, 21)
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22. A device, comprising:
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a microstructure including a first body, a second body, and capacitive coupling elements, said second body being capacitively coupled to said first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, wherein a relative displacement between said second body and said first body is detectable; an amplifier coupled to said microstructure for detecting said relative displacement; a calibration circuit comprising a shift voltage source; DC decoupling elements arranged between said microstructure and said amplifier, said DC decoupling elements connected to inputs of said amplifier and to said capacitive coupling elements; a common-mode voltage source for supplying a common-mode voltage to said amplifier; and first switches for alternatively connecting and disconnecting inputs of said amplifier and said common-mode voltage source, and second switches for alternatively connecting and disconnecting said capacitive-coupling elements and said shift voltage source. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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Specification