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Bulk acoustic wave resonator and circuit comprising same

  • US 7,616,079 B2
  • Filed: 09/18/2003
  • Issued: 11/10/2009
  • Est. Priority Date: 10/08/2002
  • Status: Active Grant
First Claim
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1. A filter comprising resonators for use with bulk acoustic waves,each of the resonators for use with bulk acoustic waves comprising:

  • a lower layer region comprising a first electrode;

    an upper layer region comprising a second electrode; and

    a piezoelectric layer between the first electrode and the second electrode;

    wherein two of the resonators are in a stacked crystal filter arrangement, the two of the resonators comprising two bulk acoustic wave resonators, the stacked crystal filter arrangement of the two bulk acoustic wave resonators comprising;

    piezoelectric layers between an upper electrode in the stacked crystal filter arrangement and a lower electrode in the stacked crystal filter arrangement; and

    a shared electrode among the piezoelectric layers in the stacked crystal filter arrangement;

    wherein an additional resonator is connected to the stacked crystal filter arrangement so that a combination of the two resonators and the additional resonator form an element of a lattice-type filter or a ladder-type filter, the additional resonator comprising a bulk acoustic wave resonator or an inductive-capacitive (LC) resonator;

    a capacitor in series or in parallel with one of the two resonators in the stacked crystal filter arrangement, anda multilayer substrate, wherein the capacitor is integrated into the multilayer substrate, the capacitor comprising structured metal layers within the multilayer substrate.

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