Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus

• US 7,619,738 B2
• Filed: 12/21/2007
• Issued: 11/17/2009
• Est. Priority Date: 09/20/2002
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Van Haren, Richard Johannes Franciscus, Megens, Henry, Lalbahadoersing, Sanjay, Van Der Schaar, Maurits, Hinnen, Paul Christiaan
• Primary Examiner(s): LAUCHMAN, LAYLA G
• Application Number:
  US12/003,377
• Publication Number:
  US 20080180668A1
• Time in Patent Office: 697 Days
• Field of Search: 356399-401, 356/364
• US Class Current: 356/401
• CPC Class Codes: G03F 9/7046 Strategy, e.g. mark, sensor or wavelength selection
• CPC Class Codes: G03F 9/7049 Technique, e.g. interferometric
• CPC Class Codes: G03F 9/7076 Mark details, e.g. phase grating mark, temporary mark
• CPC Class Codes: G03F 9/7084 Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
• CPC Class Codes: G03F 9/7092 Signal processing

Abstract

A marker structure on a substrate for optical alignment of the substrate includes a plurality of first structural elements and a plurality of second structural elements. In use, the marker structure allows the optical alignment based upon providing at least one light beam directed on the marker structure, detecting light received from the marker structure at a sensor, and determining alignment information from the detected light, the alignment information comprising information relating a position of the substrate to the sensor.

Claims

1. An alignment method using a marker structure, the method comprising:

providing at least one light beam directed on a marker structure comprising a plurality of first structural elements, and a plurality of second structural elements, wherein at least one first structural element of the plurality of first structural elements comprises a plurality of primary lines and a plurality of first interposed lines;

detecting light received from the marker structure at a sensor; and

determining alignment information from the detected light, the alignment information comprising information relating to a position of the marker structure, wherein the at least one light beam has a linear polarization extending substantially perpendicular to a direction of a periodic structure formed by the plurality of first interposed lines, or the sensor has a polarization filter which allows transmission of light having that linear polarization.

2. The alignment method according to claim 1, wherein the plurality of first interposed lines are arranged in a parallel configuration to the plurality of primary lines.

3. The alignment method according to claim 1, wherein the plurality of primary lines are composed of a different material than the plurality of first interposed lines.

4. The alignment method according to claim 1, wherein the at least one light beam includes a first light beam and a second light beam that are directed on the marker structure, the second light beam having a polarization direction that is substantially perpendicular to the first light beam.

5. The alignment method according to claim 4, wherein the first light beam and the second light beam have different wavelengths.

6. The alignment method according to claim 1, wherein at least one second structural element of the plurality of second structural elements comprises a plurality of secondary lines and a plurality of second interposed lines, the plurality of second interposed lines forming a periodic structure in a direction substantially perpendicular to the direction of the periodic structure formed by the plurality of first interposed lines.

7. The alignment method according to claim 6, wherein the at least one light beam is configured to be transmitted by the plurality of primary lines.

8. The alignment method according to claim 1, wherein the plurality of first and second structural elements are arranged to form a diffraction grating.

9. The alignment method according to claim 8, wherein the periodic structure extends in a direction substantially perpendicular to a periodic direction of the diffraction grating.

10. The alignment method according to claim 8, wherein the periodic structure extends in a direction substantially parallel to a periodic direction of the diffraction grating.

11. The alignment method according to claim 1, wherein the marker structure is a first marker structure and wherein there is a second marker structure located under the first marker structure, the second marker structure comprising a plurality of first structural elements, and a plurality of second structural elements, wherein at least one first structural element of the plurality of first structural elements of the second marker structure comprises a plurality of primary lines and a plurality of first interposed lines.

12. The alignment method according to claim 11, wherein the plurality of first structural elements of the first marker structure cover the plurality of second structural elements of the second marker structure.

13. An alignment method using a marker structure, the method comprising:

providing at least one light beam directed on a marker structure comprising a plurality of first structural elements, and a plurality of second structural elements, wherein at least one first structural element of the plurality of first structural elements comprises a plurality of primary lines and a plurality of first interposed lines;

detecting light received from the marker structure at a sensor; and

determining alignment information from the detected light, the alignment information comprising information relating to a position of the marker structure, wherein the at least one light beam has a linear polarization extending substantially parallel to a direction of a periodic structure formed by the plurality of first interposed lines, or the sensor has a polarization filter which allows transmission of light having that linear polarization.

14. The alignment method according to claim 13, wherein the plurality of first interposed lines are arranged in a parallel configuration to the plurality of primary lines.

15. The alignment method according to claim 13, wherein the plurality of primary lines are composed of a different material than the plurality of first interposed lines.

16. The alignment method according to claim 13, wherein the at least one light beam includes a first light beam and a second light beam that are directed on the marker structure, the second light beam having a polarization direction that is substantially perpendicular to the first light beam.

17. The alignment method according to claim 16, wherein the first light beam and the second light beam have different wavelengths.

18. The alignment method according to claim 13, wherein at least one second structural element of the plurality of second structural elements comprises a plurality of secondary lines and a plurality of second interposed lines, the plurality of second interposed lines forming a periodic structure in a direction substantially perpendicular to the direction of the periodic structure formed by the plurality of first interposed lines.

19. The alignment method according to claim 18, wherein the at least one light beam is configured to be transmitted by the plurality of secondary lines.

20. The alignment method according to claim 13, wherein the plurality of first and second structural elements are arranged to form a diffraction grating.

21. The alignment method according to claim 20, wherein the periodic structure extends in a direction substantially perpendicular to a periodic direction of the diffraction grating.

22. The alignment method according to claim 20, wherein the periodic structure extends in a direction substantially parallel to a periodic direction of the diffraction grating.

23. The alignment method according to claim 13, wherein the marker structure is a first marker structure and wherein there is a second marker structure located under the first marker structure, the second marker structure comprising a plurality of first structural elements, and a plurality of second structural elements, wherein at least one first structural element of the plurality of first structural elements of the second marker structure comprises a plurality of primary lines and a plurality of first interposed lines.

24. The alignment method according to claim 23, wherein the plurality of first structural elements of the first marker structure cover the plurality of second structural elements of the second marker structure.

25. A lithographic projection apparatus, comprising:

a support configured to support a patterning device, the patterning device configured to pattern a beam of radiation according to a desired pattern;

a substrate table configured to hold a substrate;

a projection system configured to project the patterned beam onto a target portion of the substrate; and

a substrate alignment system configured to detect a position of the substrate relative to a position of the patterning device, wherein the substrate alignment system is configured to provide at least one light beam directed on a marker structure comprising a plurality of first structural elements, and a plurality of second structural elements, wherein at least one first structural element of the plurality of first structural elements comprises a plurality of primary lines and a plurality of first interposed lines, wherein the substrate alignment system is configured to detect light received from the marker structure and to determine the position from the detected light, and wherein the at least one light beam has a linear polarization extending substantially perpendicular to a direction of a periodic structure formed by the plurality of first interposed lines, or the substrate alignment system has a polarization filter which allows transmission of light having that linear polarization.