Method of manufacturing implantable wireless sensor for in vivo pressure measurement
First Claim
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1. A method of manufacturing a sensor for in vivo applications, comprising the steps of:
- providing first and second wafers of an electrically insulating material;
forming a recess in said first wafer;
forming a first capacitor plate in said recess of said first wafer;
forming a second capacitor plate in a corresponding region of said second wafer;
mutually imposing said first and second wafers such that said first and second capacitor plates are arranged in parallel, spaced-apart relation; and
affixing said first and second wafers to one another in said mutually imposed position by laser-cutting said mutually imposed wafers to reduce the sensor to its final size and to hermetically fuse the two wafers together.
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Abstract
A method of manufacturing a sensor for in vivo applications includes the steps of providing two wafers of an electrically insulating material. A recess is formed in the first wafer, and a capacitor plate is formed in the recess of the first wafer. A second capacitor plate is formed in a corresponding region of the second wafer, and the two wafers are affixed to one another such that the first and second capacitor plates are arranged in parallel, spaced-apart relation.
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Citations
22 Claims
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1. A method of manufacturing a sensor for in vivo applications, comprising the steps of:
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providing first and second wafers of an electrically insulating material; forming a recess in said first wafer; forming a first capacitor plate in said recess of said first wafer; forming a second capacitor plate in a corresponding region of said second wafer; mutually imposing said first and second wafers such that said first and second capacitor plates are arranged in parallel, spaced-apart relation; and affixing said first and second wafers to one another in said mutually imposed position by laser-cutting said mutually imposed wafers to reduce the sensor to its final size and to hermetically fuse the two wafers together. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification