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Method for manufacturing a thin film transistor device

  • US 7,622,335 B2
  • Filed: 08/26/2004
  • Issued: 11/24/2009
  • Est. Priority Date: 12/04/1992
  • Status: Expired due to Fees
First Claim
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1. A method for manufacturing a semiconductor device comprising:

  • forming a first semiconductor film in a peripheral circuit region and a second semiconductor film in a pixel region over a substrate;

    forming a gate insulating film over the first semiconductor film and the second semiconductor film;

    forming a first gate electrode and a second gate electrode over the first semiconductor film and the gate insulating film, and a third gate electrode over the second semiconductor film and the gate insulating film;

    forming a pair of first impurity regions and a pair of second impurity regions in the first semiconductor film, wherein one of the pair of first impurity regions is in physical contact with one of the pair of second impurity regions;

    forming a pair of third impurity regions in the second semiconductor film; and

    forming a wiring electrically connected to the one of the pair of first impurity regions and the one of the pair of second impurity regions.

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