Semiconductor device and method for manufacturing the same

• US 7,622,736 B2
• Filed: 12/01/2005
• Issued: 11/24/2009
• Est. Priority Date: 12/07/2004
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Nomura, Ryoji, Abe, Hiroko, Moriya, Yoshitaka, Yukawa, Mikio
• Primary Examiner(s): LOUIE, WAI SING
• Application Number:
  US11/579,145
• Publication Number:
  US 20070215869A1
• Time in Patent Office: 1,454 Days
• Field of Search: 257/48, 257/184, 257/187, 257/222, 257/226
• US Class Current: 257/48
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 11/22 using ferroelectric elements
• CPC Class Codes: G11C 13/0014 comprising cells based on organic memory material

Abstract

It is an object of the present invention to provide a volatile semiconductor device into which data can be additionally written and which is easy to manufacture, and a method for manufacturing the same. It is a feature of the present invention that a semiconductor device includes an element formation layer including a first transistor and a second transistor which are provided over a substrate; a memory element provided over the element formation layer; and a sensor portion provided above the memory element, wherein the memory element has a layered structure including a first conductive layer, and an organic compound layer, and a second conductive layer, the first conductive layer is electrically connected to the first transistor, and the sensor portion is electrically connected to the second transistor.

Claims

1. A semiconductor device comprising:

an element formation layer including a first transistor and a second transistor which are provided over a substrate;

a memory element provided over the element formation layer; and

a sensor portion provided above the memory element,

wherein the memory element has a layered structure including a first conductive layer, an organic compound layer, and a second conductive layer,

wherein the first conductive layer is electrically connected to the first transistor, and

wherein the sensor portion is electrically connected to the second transistor.

4. The semiconductor device according to claim 1,

wherein a conductive layer provided in the sensor portion is electrically connected to a source or drain region of the second transistor through a conductive particle, so that the sensor portion is electrically connected to the second transistor.

14. The semiconductor device according to claim 1,

wherein distance between the first conductive layer and the second conductive layer is changed by writing in the memory element.

15. The semiconductor device according to claim 1,

wherein each of the first, second and third transistors is an organic transistor.

16. The semiconductor device according to claim 1,

wherein the substrate is a glass substrate or a flexible substrate.

17. The semiconductor device according to claim 1,

wherein the organic compound layer contains a high molecular weight compound.

18. The semiconductor device according to claim 17,

wherein the high molecular weight compound is [methoxy-5-(2-ethyl) hexyloxy]-p-phenylene vinylene (MEH-PPV) or poly (9-vinylcarbazole) (PVK).

19. The semiconductor device according to claim 1,

wherein resistance of the memory element changes irreversibly by writing.

2. A semiconductor device comprising:

an element formation layer including a first transistor, a second transistor, and a third transistor which are provided over a substrate;

a memory element provided over the element formation layer;

a conductive layer which functions as an antenna; and

a sensor portion provided above the memory element,

wherein the memory element has a layered structure including a first conductive layer, an organic compound layer, and a second conductive layer,

wherein the first conductive layer is electrically connected to the first transistor,

wherein the sensor portion is electrically connected to the second transistor, and

wherein the conductive layer which functions as the antenna is electrically connected to the third transistor.

3. The semiconductor device according to claim 2,

wherein the conductive layer which functions as the antenna is provided on a same layer as the first conductive layer.

20. The semiconductor device according to claim 2,

wherein a conductive layer provided in the sensor portion is electrically connected to a source or drain region of the second transistor through a conductive particle, so that the sensor portion is electrically connected to the second transistor.

24. The semiconductor device according to claim 2,

wherein distance between the first conductive layer and the second conductive layer is changed by writing in the memory element.

29. The semiconductor device according to claim 2,

wherein each of the first, second and third transistors is an organic transistor.

34. The semiconductor device according to claim 2,

wherein the substrate is a glass substrate or a flexible substrate.

39. The semiconductor device according to claim 2,

wherein the organic compound layer contains a high molecular weight compound.

44. The semiconductor device according to claim 39,

wherein the high molecular weight compound is [methoxy-5-(2-ethyl) hexyloxy]- p-phenylene vinylene (MEH-PPV) or poly (9-vinylcarbazole) (PVK).

49. The semiconductor device according to claim 2,

wherein resistance of the memory element changes irreversibly by writing.

5. A semiconductor device comprising:

an element formation layer including a first transistor, a second transistor, and a sensor portion which are provided over a substrate; and

a memory element provided over the element formation layer,

wherein the memory element has a layered structure including a first conductive layer, an organic compound layer, and a second conductive layer,

wherein the first conductive layer is electrically connected to the first transistor, and

wherein the sensor portion is electrically connected to the second transistor.

8. The semiconductor device according to claim 5,

wherein the sensor portion includes a photodiode or a phototransistor.

25. The semiconductor device according to claim 5,

wherein distance between the first conductive layer and the second conductive layer is changed by writing in the memory element.

30. The semiconductor device according to claim 5,

wherein each of the first, second and third transistors is an organic transistor.

35. The semiconductor device according to claim 5,

wherein the substrate is a glass substrate or a flexible substrate.

40. The semiconductor device according to claim 5,

wherein the organic compound layer contains a high molecular weight compound.

45. The semiconductor device according to claim 40,

wherein the high molecular weight compound is [methoxy-5-(2-ethyl) hexyloxy]-p-phenylene vinylene (MEH-PPV) or poly (9-vinylcarbazole) (PVK).

50. The semiconductor device according to claim 5,

wherein resistance of the memory element changes irreversibly by writing.

6. A semiconductor device comprising:

an element formation layer including a first transistor, a second transistor, a third transistor, and a sensor portion which are provided over a substrate;

a memory element provided over the element formation layer; and

a conductive layer which functions as an antenna,

wherein the memory element has a layered structure including a first conductive layer, an organic compound layer, and a second conductive layer,

wherein the first conductive layer is electrically connected to the first transistor, and

wherein the sensor portion is electrically connected to the second transistor, and

wherein the conductive layer which functions as the antenna is electrically connected to the third transistor.

7. The semiconductor device according to claim 6,

wherein the conductive layer which functions as the antenna is provided on a same layer as the first conductive layer.

21. The semiconductor device according to claim 6,

wherein the sensor portion includes a photodiode or a phototransistor.

26. The semiconductor device according to claim 6,

wherein distance between the first conductive layer and the second conductive layer is changed by writing in the memory element.

31. The semiconductor device according to claim 6,

wherein each of the first, second and third transistors is an organic transistor.

36. The semiconductor device according to claim 6,

wherein the substrate is a glass substrate or a flexible substrate.

41. The semiconductor device according to claim 6,

wherein the organic compound layer contains a high molecular weight compound.

46. The semiconductor device according to claim 41,

wherein the high molecular weight compound is [methoxy-5-(2-ethyl) hexyloxy]-p-phenylene vinylene (MEH-PPV) or poly (9-vinylcarbazole) (PVK).

51. The semiconductor device according to claim 6,

wherein resistance of the memory element changes irreversibly by writing.

9. A semiconductor device comprising:

an element formation layer including a first transistor and a second transistor which are provided over a substrate; and

a memory element and a sensor portion which are provided over the element formation layer,

wherein the memory element has a layered structure including a first conductive layer, a first organic compound layer, and a second conductive layer,

wherein the sensor portion has a layered structure including a third conductive layer, a second organic compound layer and a fourth conductive layer,

wherein the first conductive layer is electrically connected to the first transistor, and

wherein the third conductive layer is electrically connected to the second transistor.

12. The semiconductor device according to claim 9,

wherein the first conductive layer and the third conductive layer are provided on a same layer.

13. The semiconductor device according to claim 9,

wherein a same material is used for the first organic compound layer and the second organic compound layer.

27. The semiconductor device according to claim 9,

wherein distance between the first conductive layer and the second conductive layer is changed by writing in the memory element.

32. The semiconductor device according to claim 9,

wherein each of the first, second and third transistors is an organic transistor.

37. The semiconductor device according to claim 9,

wherein the substrate is a glass substrate or a flexible substrate.

42. The semiconductor device according to claim 9,

wherein the first organic compound layer contains a high molecular weight compound.

47. The semiconductor device according to claim 42,

wherein the high molecular weight compound is [methoxy-5-(2-ethyl) hexyloxy]-p-phenylene vinylene (MEH-PPV) or poly (9-vinylcarbazole) (PVK).

52. The semiconductor device according to claim 9,

wherein resistance of the memory element changes irreversibly by writing.

10. A semiconductor device comprising:

an element formation layer including a first transistor, a second transistor, and a third transistor which are provided over a substrate;

a memory element and a sensor portion which are provided over the element formation layer; and

a conductive layer which functions as an antenna,

wherein the memory element has a layered structure including a first conductive layer, a first organic compound layer, and a second conductive layer,

wherein the sensor portion has a layered structure including a third conductive layer, a second organic compound layer, and a fourth conductive layer,

wherein the first conductive layer is electrically connected to the first transistor,

wherein the third conductive layer is electrically connected to the second transistor, and

wherein the conductive layer which functions as the antenna is electrically connected to the third transistor.

11. The semiconductor device according to claim 10,

wherein the conductive layer which functions as the antenna is provided on a same layer as at least one of the first conductive layer and the third conductive layer.

22. The semiconductor device according to claim 10,

wherein the first conductive layer and the third conductive layer are provided on a same layer.

23. The semiconductor device according to claim 10,

wherein a same material is used for the first organic compound layer and the second organic compound layer.

28. The semiconductor device according to claim 10,

wherein distance between the first conductive layer and the second conductive layer is changed by writing in the memory element.

33. The semiconductor device according to claim 10,

wherein each of the first, second and third transistors is an organic transistor.

38. The semiconductor device according to claim 10,

wherein the substrate is a glass substrate or a flexible substrate.

43. The semiconductor device according to claim 10,

wherein the first organic compound layer contains a high molecular weight compound.

48. The semiconductor device according to claim 43,

wherein the high molecular weight compound is [methoxy-5-(2-ethyl) hexyloxy]-p-phenylene vinylene (MEH-PPV) or poly (9-vinylcarbazole) (PVK).

53. The semiconductor device according to claim 10,

wherein resistance of the memory element changes irreversibly by writing.