Surface inspection by amplitude modulated specular light detection
First Claim
1. An apparatus for detecting defects on a disk surface, comprising:
- a light source that generates a light beam;
a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion, the first light beam portion illuminating the surface of the disk and produces a reflected light beam;
an acoustic-optic deflector that deflects the reflected light beam and the second light beam portion producing a deflected output beam having a deflection angle; and
a detector that detects an incident beam translation signal corresponding to reflected light beam angular deflection and acoustic-optic deflector beam angular deflection from the deflected output beam.
6 Assignments
0 Petitions
Accused Products
Abstract
An apparatus for detecting defects on a disk surface includes a light source that generates a light beam and a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion. The first light beam portion illuminates the surface of the disk and produces a reflected light beam. An acoustic-optic deflector deflects the reflected light beam and the second light beam portion producing a deflected output beam having a deflection angle. A detector detects an incident beam translation signal corresponding to reflected light beam angular deflection and acoustic-optic deflector beam angular deflection from the deflected output beam.
30 Citations
20 Claims
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1. An apparatus for detecting defects on a disk surface, comprising:
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a light source that generates a light beam; a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion, the first light beam portion illuminating the surface of the disk and produces a reflected light beam; an acoustic-optic deflector that deflects the reflected light beam and the second light beam portion producing a deflected output beam having a deflection angle; and a detector that detects an incident beam translation signal corresponding to reflected light beam angular deflection and acoustic-optic deflector beam angular deflection from the deflected output beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for detecting defects on a disk surface, comprising:
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generating a light beam; splitting the light beam into a first light beam portion and a second light beam portion, the first light beam portion illuminating the surface of the disk which produces a reflected light beam; deflecting the reflected light beam and the second light beam portion to produce a deflected output beam having a deflection angle; and detecting an incident beam translation signal corresponding to reflected light beam angular deflection and acoustic-optic deflector beam angular deflection from the deflected output beam. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A system for detecting defects on a disk surface, comprising:
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a light source that generates a light beam; a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion, the first light beam portion illuminating the surface of the disk and produces a reflected light beam; an acoustic-optic deflector that deflects the reflected light beam and the second light beam portion producing a deflected output beam having a deflection angle; a detector that detects an incident beam translation signal corresponding to reflected light beam angular deflection and acoustic-optic deflector beam angular deflection from the deflected output beam; and a processor coupled to the detector that determines the presence of a defect based on the incident beam translation signal. - View Dependent Claims (19, 20)
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Specification