Differential pressure sensor isolation in a process fluid pressure transmitter
First Claim
1. A differential pressure transmitter comprising:
- first and second process fluid inlets;
a differential pressure sensor having first and second sensor inlets;
a first isolator diaphragm disposed proximate the first process fluid inlet and operably coupled to the first sensor inlet through a first fill fluid volume;
a second isolator diaphragm disposed proximate the second process fluid inlet and operably coupled to the second sensor inlet through a second fill fluid volume;
transmitter circuitry operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication thereof;
a third fluid volume substantially surrounding the differential pressure sensor, the third fluid volume exerting a compressive force on the differential pressure sensor; and
first and second secondary isolator diaphragms, wherein the first secondary isolator diaphragm is operably coupled to the first isolator diaphragm and separates the first fill fluid volume from the third fluid volume, and wherein the second secondary isolator diaphragm is operably coupled to the second isolator diaphragm and separates the second fill fluid volume from the third fluid volume.
1 Assignment
0 Petitions
Accused Products
Abstract
A differential pressure transmitter includes first and second process fluid inlets. A differential pressure sensor is disposed within the transmitter and has first and second sensor inlets. A first isolator diaphragm is located proximate the first process fluid inlet and is operably coupled to the first sensor inlet through a first fill fluid volume. A second isolator diaphragm is located proximate the second process fluid inlet and is operably coupled to the second sensor inlet through a second fill fluid volume. Measurement circuitry is operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication of the measured parameter. A third fluid volume substantially surrounds the differential pressure sensor. The third fluid volume exerts a compressive force on the differential pressure sensor.
-
Citations
10 Claims
-
1. A differential pressure transmitter comprising:
-
first and second process fluid inlets; a differential pressure sensor having first and second sensor inlets; a first isolator diaphragm disposed proximate the first process fluid inlet and operably coupled to the first sensor inlet through a first fill fluid volume; a second isolator diaphragm disposed proximate the second process fluid inlet and operably coupled to the second sensor inlet through a second fill fluid volume; transmitter circuitry operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication thereof; a third fluid volume substantially surrounding the differential pressure sensor, the third fluid volume exerting a compressive force on the differential pressure sensor; and first and second secondary isolator diaphragms, wherein the first secondary isolator diaphragm is operably coupled to the first isolator diaphragm and separates the first fill fluid volume from the third fluid volume, and wherein the second secondary isolator diaphragm is operably coupled to the second isolator diaphragm and separates the second fill fluid volume from the third fluid volume. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A differential pressure transmitter comprising:
-
first and second process fluid inlets; a differential pressure sensor having first and second sensor inlets, in which the differential pressure sensor is a MEMS device; a first isolator diaphragm disposed proximate the first process fluid inlet and operably coupled to the first sensor inlet through a first fill fluid volume; a second isolator diaphragm disposed proximate the second process fluid inlet and operably coupled to the second sensor inlet through a second fill fluid volume; transmitter circuitry operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication thereof; a third fluid volume substantially surrounding the differential pressure sensor, the third fluid volume exerting a compressive force on the differential pressure sensor.
-
-
9. The differential pressure transmitter comprising:
-
first and second process fluid inlets; a differential pressure sensor having first and second sensor inlets; a first isolator diaphragm disposed proximate the first process fluid inlet and operably coupled to the first sensor inlet through a first fill fluid volume; a second isolator diaphragm disposed proximate the second process fluid inlet and operably coupled to the second sensor inlet through a second fill fluid volume; transmitter circuitry operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication thereof; a third fluid volume substantially surrounding the differential pressure sensor, the third fluid volume exerting a compressive force on the differential pressure sensor; and a compensation body disposed within the third fluid volume, wherein the compensation body is constructed from a material having a coefficient of thermal expansion that offsets thermal effects of at least one fluid volume.
-
-
10. A differential pressure transmitter comprising:
-
A first pressure sensor having a first sensor inlet; a second pressure sensor having a second sensor inlet; first and second process fluid inlets; a first isolator diaphragm disposed proximate the first process fluid inlet and operably coupled to the first sensor inlet through a first fill fluid volume; a second isolator diaphragm disposed proximate the second process fluid inlet and operably coupled to the second sensor inlet through a second fill fluid volume; transmitter circuitry operably coupled to the first and second pressure sensors and configured to measure an electrical parameter of the sensors and provide an indication of differential pressure; a third fluid volume substantially surrounding the first and second pressure sensors, the third fluid volume exerting a compressive force on the first and second pressure sensors; and first and second secondary isolator diaphragms, wherein the first secondary isolator diaphragm is operably coupled to the first isolator diaphragm and separates the first fill fluid volume from the third fluid volume, and wherein the second secondary isolator diaphragm is operably coupled to the second isolator diaphragm and separates the second fill fluid volume from the third fluid volume.
-
Specification