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Probe station having multiple enclosures

  • US 7,626,379 B2
  • Filed: 10/24/2007
  • Issued: 12/01/2009
  • Est. Priority Date: 06/06/1997
  • Status: Expired due to Fees
First Claim
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1. A probe station for probing a test device, said probe station comprising:

  • (a) a chuck suitable for supporting said test device during probing thereof;

    (b) an electrically conductive first enclosure at least partially enclosing said chuck and insulated therefrom;

    (c) an electrically conductive second enclosure interposed between and insulated from said first enclosure and said chuck, and at least partially enclosing said chuck;

    (d) respective electrical connections connected electrically to said chuck and said second enclosure, respectively, causing said second enclosure and said chuck to have respective potentials independent of each other;

    (e) said second enclosure having a first portion substantially fixedly mounted with respect to said first enclosure and a second portion movably mounted with respect to said first enclosure, said chuck and said second portion being interconnected so as to move in unison with respect to said first portion.

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