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Method of evaluating surface deformation

  • US 7,627,428 B2
  • Filed: 11/01/2007
  • Issued: 12/01/2009
  • Est. Priority Date: 11/01/2006
  • Status: Expired due to Fees
First Claim
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1. A process for calculating surface deformation, comprising:

  • a. providing a substrate having p layers;

    b. providing a load body having a contacting surface and the contacting surface is in contact with and disposed on the substrate and exerting a vertical load on the substrate;

    c. dividing the load body'"'"'s contacting surface into a number L of circles each having an equal radius R;

    d. choosing N stations located at the surface of the substrate;

    e. selecting a desired maximum RMS relative error;

    f. selecting a number M of control points for forming a B-spline curve of the surface displacement in the radial direction;

    g. checking the expected error resulting from the number M of selected control points and comparing the expected error to the desired maximum RMS relative error;

    h. proceeding to a next step when the expected error is equal to or less than the desired maximum RMS relative error, or selecting more control points when the expected error is greater than the desired maximum RMS relative error;

    i. pre-calculating B-spline coefficients for a near field surface displacement, wherein the near field contains control points having spacing r, wherein r can have values between 0 and 2R, wherein the near field is defined by the range from 0 to 2R, wherein the near field is divided into three subsections defined by 0 to R−

    δ

    , R−

    δ

    to R+δ

    , and R+δ

    to 2R, wherein δ

    is between 0.02R and 0.1R, and wherein the distance between each control point within the first and third subsections is graded so that |ri+1

    ri|=g|ri

    ri−

    1
    | and wherein g is between 1 and 2;

    j. pre-calculating B-spline coefficients for a middle field surface displacement, wherein the middle field contains control points having spacing r, wherein r can vary from 2R to 40R, wherein the control points are uniformly distributed in the middle field by a spacing defined according to the natural logarithmic function ln(r);

    k. pre-calculating inverse B-spline coefficients for a far field, wherein the far field contains control points having spacing 1/r, wherein r can vary from 40R to 100R, wherein the control points are uniformly distributed according to the function 1/r;

    l. selecting coefficients and inverse coefficients from the pre-calculated coefficients and inverse coefficients, and forming a B-spline therefrom;

    m. interpolating according to the B-spline; and

    n. calculating station displacement for each station.

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