MEMS device and method of reducing stiction in a MEMS device
First Claim
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1. A MEMS device, comprising:
- a substrate;
a movable mass suspended in proximity to the substrate; and
at least one suspension structure coupled to the movable mass for performing a mechanical spring function,wherein the at least one suspension structure has portions that move in tandem when the MEMS device is subject to a stimulus along at least one sensing direction, and wherein the at least one suspension structure further includes at least one link between the portions that move in tandem, wherein the at least one suspension structure has an axial spring constant (Ky) along a longitudinal axis and a transverse spring constant (Kx) along a transverse axis and in the at least one sensing direction, wherein the at least one link does not significantly increase the transverse spring constant (Kx) of the at least one suspension structure.
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Abstract
A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function. The at least one suspension structure has portions that move in tandem when the MEMS device is subject to at least one stimulus in a sensing direction, and further includes at least one link between the portions that move in tandem.
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Citations
20 Claims
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1. A MEMS device, comprising:
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a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function, wherein the at least one suspension structure has portions that move in tandem when the MEMS device is subject to a stimulus along at least one sensing direction, and wherein the at least one suspension structure further includes at least one link between the portions that move in tandem, wherein the at least one suspension structure has an axial spring constant (Ky) along a longitudinal axis and a transverse spring constant (Kx) along a transverse axis and in the at least one sensing direction, wherein the at least one link does not significantly increase the transverse spring constant (Kx) of the at least one suspension structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of reducing stiction in a MEMS device having a substrate, a movable mass suspended in proximity to the substrate, and at least one suspension structure coupled to the movable mass for performing a mechanical spring function and including portions that move in tandem when the MEMS device is subject to a stimulus along at least one sensing direction, wherein the at least one suspension structure has an axial spring constant (Ky) along a longitudinal axis and a transverse spring constant (Kx) along a transverse axis and in the at least one sensing direction, the method comprising:
providing at least one link between the portions that move in tandem such that the at least one link does not significantly increase the transverse spring constant (Kx) of the at least one suspension structure. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A MEMS device, comprising:
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a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function, wherein the at least one suspension structure has a first segment and a second segment that move in tandem when the MEMS device is subject to a stimulus along at least one sensing direction, the first and second segments exhibiting mirror symmetry relative to one another along a symmetry axis, and wherein the at least one suspension structure further includes at least one link, at least a portion of the at least one link lying on the symmetry axis between the first and second segments.
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Specification