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Spatial light modulator

  • US 7,629,197 B2
  • Filed: 10/18/2006
  • Issued: 12/08/2009
  • Est. Priority Date: 10/18/2006
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing an interferometric modulator array, the method comprising:

  • providing a first substrate;

    depositing a partially reflective layer on the first substrate;

    providing a second substrate;

    forming one or more dies on the second substrate, each die comprising at least a portion of one interferometric modulator, wherein forming the one or more dies comprisesforming an electrode over the second substrate,forming a dielectric layer over the electrode,forming a first supporting spacer over the dielectric layer,forming a movable reflective layer over the first supporting spacer, andforming a second supporting spacer over the movable reflective layer; and

    joining the first substrate to the second substrate to form a cavity between the partially reflective layer of the first substrate and the movable reflective layer of the second substrate.

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