Spatial light modulator
First Claim
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1. A method of manufacturing an interferometric modulator array, the method comprising:
- providing a first substrate;
depositing a partially reflective layer on the first substrate;
providing a second substrate;
forming one or more dies on the second substrate, each die comprising at least a portion of one interferometric modulator, wherein forming the one or more dies comprisesforming an electrode over the second substrate,forming a dielectric layer over the electrode,forming a first supporting spacer over the dielectric layer,forming a movable reflective layer over the first supporting spacer, andforming a second supporting spacer over the movable reflective layer; and
joining the first substrate to the second substrate to form a cavity between the partially reflective layer of the first substrate and the movable reflective layer of the second substrate.
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Abstract
An interferometric spatial light modulator comprises of two cavities. One is the optical resonant cavity having a partially reflective film and a movable reflective membrane as two walls, and the other is the electromechanical actuation cavity having the movable reflective membrane and a bottom metal layer as electrodes. The spatial light modulator is built on silicon substrate and is actively addressed. A microdisplay apparatus of such spatial light modulators and a projection display system using such microdisplay are also disclosed.
247 Citations
21 Claims
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1. A method of manufacturing an interferometric modulator array, the method comprising:
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providing a first substrate; depositing a partially reflective layer on the first substrate; providing a second substrate; forming one or more dies on the second substrate, each die comprising at least a portion of one interferometric modulator, wherein forming the one or more dies comprises forming an electrode over the second substrate, forming a dielectric layer over the electrode, forming a first supporting spacer over the dielectric layer, forming a movable reflective layer over the first supporting spacer, and forming a second supporting spacer over the movable reflective layer; and joining the first substrate to the second substrate to form a cavity between the partially reflective layer of the first substrate and the movable reflective layer of the second substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of manufacturing an interferometric modulator display device, the method comprising:
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forming an array plate, wherein forming the array plate comprises forming an electrode over the array plate, forming a dielectric layer over the electrode, forming a first supporting spacer over the dielectric layer, forming a movable reflective layer over the first supporting spacer, and forming a second supporting spacer over the movable reflective layer; forming a backplate comprising a substrate and a partially reflective layer deposited thereon; and sealing the array plate to the backplate to form a cavity between the partially reflective layer of the backplate and the movable reflective layer of the array plate. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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Specification