Micromechanical actuator with asymmetrically shaped electrodes
First Claim
1. An actuator system, comprising:
- a microelectromechanical (MEMS) structure comprising;
an actuator body connected with a suspension system; and
the suspension system connected with a substrate, the suspension system being configured to elevate the actuator body above the substrate upon actuation in a motion substantially perpendicular to the substrate, the suspension system comprising a set of one or more flexures and a set of one or more torsional elements, wherein each flexure connects the actuator body with the substrate and each torsional element connects a corresponding flexure with the actuator body and provides strain relief between the corresponding flexure and the actuator body, each torsional element having a length comprising the distance from the corresponding flexure to the actuator body, the length being greater than the width of the torsional element, andthe substrate connected with the MEMS structure, the substrate comprising;
a set of one or more asymmetrically shaped electrodes for inducing actuation of the suspension system when a voltage is applied to the set of electrodes; and
an interconnect layer comprising a set of one or more interconnects coupled to the set of electrodes, the set of interconnects being coupled to a control circuit for controlling voltages applied to the set of electrodes via the set of interconnects, wherein;
the suspension system and the set of electrodes are entirely located underneath the actuator body;
the set of electrodes are not located underneath the suspension system;
the entire suspension system is located underneath approximately the edge of the actuator body;
each electrode is located underneath the center of the actuator body and extends past the suspension system to a location underneath the edge of the actuator body; and
the interconnect layer is beneath the set of electrodes.
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Abstract
A micromachined actuator including a body or platform mounted to a suspension system anchored to a substrate. In one embodiment, the suspension system is comprised of a set of one or more spring flexures connecting the actuator body to the substrate with strain relief provided via connecting torsional elements. In another embodiment, the suspension system includes a first set of one or more spring flexures each with one end anchored to a largely rigid intermediate frame and the other end attached to the body. A second set of one or more flexures is attached between the intermediate frame and the substrate. A third actuator embodiment maximizes force electrode area to minimize voltage required for electrostatic actuation. A fourth embodiment provides electrical interconnect to an actuator or an actuator array using polysilicon with silicon nitride isolation. Actuators may be fabricated by combining the key features of all four embodiments or actuators may be fabricated using any combination of two or three of the embodiments.
32 Citations
10 Claims
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1. An actuator system, comprising:
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a microelectromechanical (MEMS) structure comprising; an actuator body connected with a suspension system; and the suspension system connected with a substrate, the suspension system being configured to elevate the actuator body above the substrate upon actuation in a motion substantially perpendicular to the substrate, the suspension system comprising a set of one or more flexures and a set of one or more torsional elements, wherein each flexure connects the actuator body with the substrate and each torsional element connects a corresponding flexure with the actuator body and provides strain relief between the corresponding flexure and the actuator body, each torsional element having a length comprising the distance from the corresponding flexure to the actuator body, the length being greater than the width of the torsional element, and the substrate connected with the MEMS structure, the substrate comprising; a set of one or more asymmetrically shaped electrodes for inducing actuation of the suspension system when a voltage is applied to the set of electrodes; and an interconnect layer comprising a set of one or more interconnects coupled to the set of electrodes, the set of interconnects being coupled to a control circuit for controlling voltages applied to the set of electrodes via the set of interconnects, wherein; the suspension system and the set of electrodes are entirely located underneath the actuator body; the set of electrodes are not located underneath the suspension system; the entire suspension system is located underneath approximately the edge of the actuator body; each electrode is located underneath the center of the actuator body and extends past the suspension system to a location underneath the edge of the actuator body; and the interconnect layer is beneath the set of electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification