Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method
First Claim
Patent Images
1. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:
- a movable optical device configured to reflect substantially all radiation of a first wavelength and to transmit substantially all radiation of a second wavelength;
a light sensitive element configured to receive a programming beam, the programming beam having the second wavelength, and to generate signal according to the programming beam; and
a controller configured to receive the signal and to move the optical device according to the signal.
1 Assignment
0 Petitions
Accused Products
Abstract
Each pixel of a spatial light modulator comprises a movable mirror, a light sensitive element and control circuitry to drive an actuator set the movable mirror to a state determined by a signal received by the light sensitive element.
-
Citations
37 Claims
-
1. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:
-
a movable optical device configured to reflect substantially all radiation of a first wavelength and to transmit substantially all radiation of a second wavelength; a light sensitive element configured to receive a programming beam, the programming beam having the second wavelength, and to generate signal according to the programming beam; and a controller configured to receive the signal and to move the optical device according to the signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A method of spatially modulating a radiation beam according to a pattern using a spatial light modulator comprising an array of pixels disposed on a support, comprising:
-
modulating at least one programming beam according to the pattern, the at least one programming beam being of a first wavelength; scanning the at least one programming beam across the array of pixels, to irradiate a light sensitive element of each pixel in the array of pixels, the light sensitive elements being configured to generate a signal in response to the at least one programming beam; moving at least one optical device in each array of pixels from a respective first position to a respective second position according to the signal, each of the at least one optical device transmits substantially all radiation of the first wavelength and reflects substantially all radiation of a second wavelength; and directing the radiation beam onto the spatial light modulator the radiation beam being the second wavelength, and each of the at least one optical device reflecting a respective portion of the radiation beam. - View Dependent Claims (16, 17, 18, 19, 20)
-
-
21. A lithographic projection apparatus, comprising:
-
an illumination system configured to provide beam of radiation; a programmable patterning device including a spatial light modulator having an array of pixels disposed on a support, the programming patterning device configured to pattern beam; and a projection system configured to project the patterned beam onto a target portion of a support, wherein each pixel comprises; a movable optical device configured to reflect substantially all radiation of a first wavelength and to pass substantially all radiation of a second wavelength; a light sensitive element configured to receive a programming beam, the programming beam having the second wavelength, and to generate signal according to the programming beam; and a controller configured to receive the signal and to move the moveable optical device according to the signal. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
-
-
34. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:
-
a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths; an actuator arranged to move said movable mirror between the at least two positions, wherein the movable mirror remains substantially planar during movement; a light sensitive element configured to receive a programming beam of a second wavelength and to generate a control signal in response thereto; a controller configured to control said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element; and a beam scanner comprising; a prism having reflective surfaces and disposed with its axis perpendicular to said columns; and a device configured to rotate said prism about said axis.
-
-
35. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:
-
a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths; an actuator arranged to move said movable mirror between the at least two positions, wherein the movable mirror remains substantially planar during movement; a light sensitive element configured to receive a programming beam of a second wavelength and to generate a control signal in response thereto; a controller configured to control said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element; and a beam scanner configured to scan a plurality of programming beams across said array of pixels, wherein said beam scanner comprises a plurality of independently controllable light sources corresponding in number to said plurality of beams.
-
-
36. A lithographic projection apparatus, comprising:
-
an illumination system configured to provide a projection beam of radiation; a programmable patterning device including a spatial light modulator having an array of pixels disposed on a support, the programming patterning device configured to pattern the projection beam; a beam scanner, comprising; a prism having reflective surfaces and disposed with its axis perpendicular to said columns; and a device configured to rotate said prism about said axis; a projection system for projecting the patterned beam onto a target portion of a support, wherein each pixel comprises; a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths; an actuator arranged to move said movable mirror between the at least two positions, wherein the movable mirror remains substantially planar during movement; a light sensitive element configured to receive a programming beam of a second wavelength and to generate a control signal in response thereto; and a controller configured to control said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element.
-
-
37. A lithographic projection apparatus, comprising:
-
an illumination system configured to provide a projection beam of radiation; a programmable patterning device including a spatial light modulator having an array of pixels disposed on a support, the programming patterning device configured to pattern the projection beam; a beam scanner configured to scan a plurality of programming beams across said array of pixels, wherein said beam scanner comprises a plurality of independently controllable light sources corresponding in number to said plurality of beams; and a projection system configured to project the patterned beam onto a target portion of a support, wherein each pixel comprises; a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths; an actuator arranged to move said movable mirror between the at least two positions, wherein the movable mirror remains substantially planar during movement; a light sensitive element configured to receive a programming beam of a second wavelength and to generate a control signal in response thereto; and a controller configured to control said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element.
-
Specification