Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method

• US 7,630,118 B2
• Filed: 06/16/2004
• Issued: 12/08/2009
• Est. Priority Date: 06/20/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Onvlee, Johannes
• Primary Examiner(s): Stultz; Jessica T
• Application Number:
  US10/868,191
• Publication Number:
  US 20050007671A1
• Time in Patent Office: 2,001 Days
• Field of Search: 359/290
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

Each pixel of a spatial light modulator comprises a movable mirror, a light sensitive element and control circuitry to drive an actuator set the movable mirror to a state determined by a signal received by the light sensitive element.

Claims

1. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:

a movable optical device configured to reflect substantially all radiation of a first wavelength and to transmit substantially all radiation of a second wavelength;

a light sensitive element configured to receive a programming beam, the programming beam having the second wavelength, and to generate signal according to the programming beam; and

a controller configured to receive the signal and to move the optical device according to the signal.

2. The spatial light modulator of claim 1, wherein said movable optical device and said light sensitive element are disposed on a same side of said support.

3. The spatial light modulator of claim 2, wherein said light sensitive element is disposed between said movable optical device and said support and said light sensitive element is substantially transparent to radiation of said second wavelength.

4. The spatial light modulator of claim 2, wherein said support is substantially transparent to radiation of said second wavelength.

5. The spatial light modulator of claim 1, wherein said moveable optical device and said light sensitive element are disposed on opposite sides of said support.

6. The spatial light modulator of claim 1, further comprising:

a beam scanner configured to scan at least one programming beam across said array of pixels, wherein the at least one programming beam includes the programming beam.

7. The spatial light modulator of claim 1, wherein:

said array of pixels is a two dimensional array having a plurality of rows and a plurality of columns;

the spatial light modulator further comprises a beam scanner configured to scan a plurality of programming beams equal in number to said plurality of columns along respective ones of said columns, the plurality of programming beams including the programming beam.

8. The spatial light modulator of claim 1, wherein:

said light sensitive element comprises a photodiode; and

said controller comprises an actuator, the actuator including a capacitor connected to said photodiode, so as to be charged by current generated in said photodiode by said programming beam when incident thereon.

9. The spatial light modulator of claim 8, wherein said controller further comprises:

an amplifier for amplifying the current generated in said photodiode.

10. The spatial light modulator of claim 1, wherein the movable optical device is pivotable about an axle, such that pivoting in a first direction corresponds to a first position, and pivoting in a second direction corresponds to a second position.

11. The spatial light modulator of claim 1, wherein a content of the signal is at least partially determined by a duration of the programming beam.

12. The spatial light modulator of claim 1, wherein the optical device is configured such that the programming beam passes through the optical device before being received by the light sensitive element.

13. The spatial light modulator of claim 1, wherein the optical device stays substantially planar throughout the movement.

14. The spatial light modulator of claim 1, wherein the movable optical device is configured to pattern substantially all radiation of the first wavelength.

15. A method of spatially modulating a radiation beam according to a pattern using a spatial light modulator comprising an array of pixels disposed on a support, comprising:

modulating at least one programming beam according to the pattern, the at least one programming beam being of a first wavelength;

scanning the at least one programming beam across the array of pixels, to irradiate a light sensitive element of each pixel in the array of pixels, the light sensitive elements being configured to generate a signal in response to the at least one programming beam;

moving at least one optical device in each array of pixels from a respective first position to a respective second position according to the signal, each of the at least one optical device transmits substantially all radiation of the first wavelength and reflects substantially all radiation of a second wavelength; and

directing the radiation beam onto the spatial light modulator the radiation beam being the second wavelength, and each of the at least one optical device reflecting a respective portion of the radiation beam.

16. The method according to claim 15, further comprising:

pulsing the radiation beam and performing the modulating and the scanning between pulses of the radiation beam.

17. The method of claim 15, wherein the scanning comprises pivoting the movable optical device about an axle.

18. The method of claim 15, wherein a content of the signal is at least partially determined by a duration of the programming beam.

19. The method of claim 15, wherein the optical device is configured such that the programming beam passes through the optical device before being received by the light sensitive element.

20. The lithographic projection apparatus of claim 15, wherein the optical device stays substantially planar throughout the movement.

21. A lithographic projection apparatus, comprising:

an illumination system configured to provide beam of radiation;

a programmable patterning device including a spatial light modulator having an array of pixels disposed on a support, the programming patterning device configured to pattern beam; and

a projection system configured to project the patterned beam onto a target portion of a support,

wherein each pixel comprises;

a movable optical device configured to reflect substantially all radiation of a first wavelength and to pass substantially all radiation of a second wavelength;

a light sensitive element configured to receive a programming beam, the programming beam having the second wavelength, and to generate signal according to the programming beam; and

a controller configured to receive the signal and to move the moveable optical device according to the signal.

22. The lithographic projection apparatus of claim 21, wherein said movable optical device and said light sensitive element are disposed on a same side of said support.

23. The spatial light modulator of claim 22, wherein said light sensitive element is disposed between said movable optical device and said support and said light sensitive element is substantially transparent to radiation of said second wavelength.

24. The spatial light modulator of claim 22, wherein said support is substantially transparent to radiation of said second wavelength.

25. The lithographic projection apparatus of claim 21, wherein said moveable optical device and said light sensitive element are disposed on opposite sides of said support.

26. The lithographic projection apparatus of claim 21, further comprising:

a beam scanner configured to scan at least one programming beam across said array of pixels, wherein the at least one programming beam includes the programming beam.

27. The lithographic projection apparatus of claim 21, wherein:

said array of pixels is a two dimensional array having a plurality of rows and a plurality of columns;

the lithographic projection apparatus further comprises a beam scanner configured to scan a plurality of programming beams equal in number to said plurality of columns along respective ones of said columns, wherein the plurality of programming beams includes the programming beam.

28. The lithographic projection apparatus of claim 21, wherein:

said light sensitive element comprises a photodiode; and

said controller comprises an actuator, the actuator including a capacitor connected to said photodiode, so as to be charged by current generated in said photodiode by said programming beam when incident thereon.

29. The lithographic projection apparatus of claim 28, wherein said controller further comprises:

an amplifier for amplifying the current generated in said photodiode.

30. The lithographic apparatus of claim 21, wherein the movable optical device is pivotable about an axle, such that pivoting in a first direction corresponds to a first position, and pivoting in a second direction corresponds to a second position.

31. The lithographic projection apparatus of claim 21, wherein a content of the signal is at least partially determined by a duration of the programming beam.

32. The lithographic projection apparatus of claim 21, wherein the optical device is configured such that the programming beam passes through the optical device before being received by the light sensitive element.

33. The lithographic projection apparatus of claim 21, wherein the optical device stays substantially planar throughout the movement.

34. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:

a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths;

an actuator arranged to move said movable mirror between the at least two positions, wherein the movable mirror remains substantially planar during movement;

a light sensitive element configured to receive a programming beam of a second wavelength and to generate a control signal in response thereto;

a controller configured to control said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element; and

a beam scanner comprising;

a prism having reflective surfaces and disposed with its axis perpendicular to said columns; and

a device configured to rotate said prism about said axis.

35. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:

a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths;

an actuator arranged to move said movable mirror between the at least two positions, wherein the movable mirror remains substantially planar during movement;

a light sensitive element configured to receive a programming beam of a second wavelength and to generate a control signal in response thereto;

a controller configured to control said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element; and

a beam scanner configured to scan a plurality of programming beams across said array of pixels, wherein said beam scanner comprises a plurality of independently controllable light sources corresponding in number to said plurality of beams.

36. A lithographic projection apparatus, comprising:

an illumination system configured to provide a projection beam of radiation;

a programmable patterning device including a spatial light modulator having an array of pixels disposed on a support, the programming patterning device configured to pattern the projection beam;

a beam scanner, comprising;

a prism having reflective surfaces and disposed with its axis perpendicular to said columns; and

a device configured to rotate said prism about said axis;

a projection system for projecting the patterned beam onto a target portion of a support,

wherein each pixel comprises;

a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths;

an actuator arranged to move said movable mirror between the at least two positions, wherein the movable mirror remains substantially planar during movement;

a light sensitive element configured to receive a programming beam of a second wavelength and to generate a control signal in response thereto; and

a controller configured to control said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element.

37. A lithographic projection apparatus, comprising:

an illumination system configured to provide a projection beam of radiation;

a programmable patterning device including a spatial light modulator having an array of pixels disposed on a support, the programming patterning device configured to pattern the projection beam;

a beam scanner configured to scan a plurality of programming beams across said array of pixels, wherein said beam scanner comprises a plurality of independently controllable light sources corresponding in number to said plurality of beams; and

a projection system configured to project the patterned beam onto a target portion of a support,

wherein each pixel comprises;

a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths;

an actuator arranged to move said movable mirror between the at least two positions, wherein the movable mirror remains substantially planar during movement;

a light sensitive element configured to receive a programming beam of a second wavelength and to generate a control signal in response thereto; and

a controller configured to control said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element.