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Electromechanical device with optical function separated from mechanical and electrical function

  • US 7,630,121 B2
  • Filed: 07/02/2007
  • Issued: 12/08/2009
  • Est. Priority Date: 07/02/2007
  • Status: Expired due to Fees
First Claim
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1. An electromechanical device comprising:

  • a substrate;

    a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and

    an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction towards the substrate, wherein a stationary portion of the device is configured to act as a stop for movement of the movable element, the movable element responsive to the voltage difference applied between the actuation electrode and the deformable layer by moving from a first position in which a portion of the movable element is not in contact with the stationary portion to a second position in which the portion is in contact with the stationary portion.

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