Electromechanical device with optical function separated from mechanical and electrical function
First Claim
Patent Images
1. An electromechanical device comprising:
- a substrate;
a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and
an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction towards the substrate, wherein a stationary portion of the device is configured to act as a stop for movement of the movable element, the movable element responsive to the voltage difference applied between the actuation electrode and the deformable layer by moving from a first position in which a portion of the movable element is not in contact with the stationary portion to a second position in which the portion is in contact with the stationary portion.
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Abstract
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.
263 Citations
33 Claims
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1. An electromechanical device comprising:
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a substrate; a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction towards the substrate, wherein a stationary portion of the device is configured to act as a stop for movement of the movable element, the movable element responsive to the voltage difference applied between the actuation electrode and the deformable layer by moving from a first position in which a portion of the movable element is not in contact with the stationary portion to a second position in which the portion is in contact with the stationary portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. An electromechanical device comprising:
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a substrate; a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction away from the substrate, wherein a stationary portion of the device is configured to act as a stop for movement of the movable element, the movable element responsive to the voltage difference applied between the actuation electrode and the deformable layer by moving from a first position in which a portion of the movable element is not in contact with the stationary portion to a second position in which the portion is in contact with the stationary portion. - View Dependent Claims (29, 30, 31, 32)
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33. An electromechanical device comprising:
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a movable element comprising a deformable layer and a reflective element, the deformable layer extending along at least two sides of the reflective element, the reflective element mechanically coupled to the deformable layer at least partially by a connecting element on the at least two sides; and an actuation electrode under at least a portion of the deformable layer along the at least two sides of the reflective element.
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Specification