Inorganic, dielectric, grid polarizer and non-zero order diffraction grating

• US 7,630,133 B2
• Filed: 01/31/2007
• Issued: 12/08/2009
• Est. Priority Date: 12/06/2004
• Status: Expired due to Fees

• Current Assignee: Moxtek Inc (Nippon Kayaku Company Limited)
• Original Assignee: Moxtek Inc (Nippon Kayaku Company Limited)
• Inventors: Perkins, Raymond T.
• Primary Examiner(s): Shafer; Ricky D
• Application Number:
  US11/669,765
• Publication Number:
  US 20070165307A1
• Time in Patent Office: 1,042 Days
• Field of Search: 359/486, 359/495, 359/497, 359/500, 359/569, 359/572, 359/488, 359/566, 359/575, 359/576, 359/580
• US Class Current: 359/485.05
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles

Abstract

An inorganic, dielectric grid polarizer includes an optical stack with a diffraction grating and an inorganic, dielectric grid polarizer. The inorganic, dielectric grid polarizer includes a stack of film layers with an array of parallel ribs in accordance with P_GP<λ/2 where P_GP is the period of the ribs and λ is the wavelength of the light. The diffraction grating includes an array of elongated parallel dielectric ribs in accordance with P_DG>λ/2 where P_DG is the period of the ribs.

Claims

1. An inorganic, dielectric grid polarizer device configured to polarize and further control light incident on the device, comprising:

an optical stack with a diffraction grating and an inorganic, dielectric grid polarizer with one disposed over the other;

the inorganic, dielectric grid polarizer including;

a stack of film layers,

each film layer being formed of a material that is both inorganic and dielectric;

adjacent film layers having different refractive indices;

at least one of the film layers being discontinuous to form a form birefringent layer with an array of parallel ribs in accordance with P_GP<

λ

/2 where P_GP is the period of the ribs of the grid polarizer and λ

is the wavelength of the light, to polarize any light incident on the grid polarizer by substantially reflecting the light incident on the grid polarizer with s-polarization orientation and substantially transmitting the light incident on the grid polarizer with p-polarization orientation;

the diffraction grating including an array of elongated parallel dielectric ribs in accordance with P_DG>

λ

/2 where P_DG is the period of the ribs of the diffraction grating, to substantially diffract any light incident on the diffraction grating with the s-polarization orientation of non-zero order at a non-orthogonal angle, so that the diffraction grating and the grid polarizer together substantially pass the light incident on the device having the p-polarization orientation while substantially diffracting light incident on the device having the s-polarization orientation.

2. The device in accordance with claim 1, wherein the ribs of the grid polarizer have a period less than about 210 nm;

and wherein the ribs of the diffraction grating have a period greater than 210 nm and less than 700 nm.

3. The device in accordance with claim 1, wherein the period of the diffraction grating is approximately five times greater than the period of the grid polarizer.

4. The device in accordance with claim 1, wherein the ribs of the grid polarizer have a period less than about 400 nm.

5. The device in accordance with claim 1, wherein the diffraction grating is stacked over the grid polarizer with the incident light incident on the diffraction grating;

and

wherein the diffraction grating diffracts reflected light with the s-polarization orientation having non-zero order.

6. The device in accordance with claim 1, further comprising:

a continuous layer disposed between the grid polarizer and the diffraction grating, and having a refractive index less than a refractive index of a supporting substrate.

7. The device in accordance with claim 1, further comprising:

at least two continuous layers disposed between the grid polarizer and the diffraction grating, including an upper layer with a refractive index greater than a refractive index of a lower layer.

8. The device in accordance with claim 1, wherein the device substantially transmits light with p-polarization orientation and substantially diffracts light with the s-polarization orientation of non-zero order, without substantially back reflecting light with the s-polarization orientation of zero order.

9. The device in accordance with claim 1, wherein the ribs of the diffraction grating are split into rib pairs of two relatively adjacent ribs that maintain the period between the rib pairs.

10. The device in accordance with claim 1, wherein the film layers alternate between higher and lower refractive indices.

11. The device in accordance with claim 1, wherein the device consists of only inorganic and dielectric materials.

12. The device in accordance with claim 1, wherein the device is formed without any organic or electrically conductive material.

13. The device in accordance with claim 1, wherein all of the film layers are discontinuous and form the array of parallel ribs of the grid polarizer.

14. An inorganic, dielectric grid polarizer device configured to polarize and further control light incident on the device, comprising:

an optical stack with a diffraction grating and an inorganic, dielectric grid polarizer with one disposed over the other;

the inorganic, dielectric grid polarizer including;

a stack of film layers,

each film layer being formed of a material that is both inorganic and dielectric;

adjacent film layers having different refractive indices;

at least one of the film layers being discontinuous to form a form birefringent layer with an array of parallel ribs in accordance with P_GP<

λ

/2 where P_GP is the period of the ribs of the grid polarizer and λ

is the wavelength of the light, to polarize any light incident on the grid polarizer by substantially reflecting the light incident on the grid polarizer with s-polarization orientation and substantially transmitting the light incident on the grid polarizer with p-polarization orientation;

the diffraction grating including an array of elongated parallel dielectric ribs in accordance with P_DG>

λ

/2 where P_DG is the period of the ribs of the diffraction grating, to substantially diffract any light incident on the diffraction grating with the s-polarization orientation of non-zero order at a non-orthogonal angle, so that the diffraction grating and the grid polarizer together substantially pass the light incident on the device having the p-polarization orientation while substantially diffracting the light incident on the device having s-polarization orientation; and

the ribs of the diffraction grating being split into rib pairs of two relatively adjacent ribs that maintain the period between the rib pairs.

15. The device in accordance with claim 14, wherein the ribs of the grid polarizer have a period less than about 210 nm;

and wherein the ribs of the diffraction grating have a period greater than 210 nm and less than 700 nm.

16. The device in accordance with claim 14, wherein the period of the diffraction grating is approximately five times greater than the period of the grid polarizer.

17. The device in accordance with claim 14, wherein the ribs of the grid polarizer have a period less than about 400 nm.

18. The device in accordance with claim 14, wherein the diffraction grating is stacked over the grid polarizer with the incident light incident on the diffraction grating;

and

wherein the diffraction grating diffracts reflected light with the s-polarization orientation having non-zero order.

19. The device in accordance with claim 14, further comprising:

a continuous layer disposed between the grid polarizer and the diffraction grating, and having a refractive index less than a refractive index of a supporting substrate.

20. The device in accordance with claim 14, further comprising:

at least two continuous layers disposed between the grid polarizer and the diffraction grating, including an upper layer with a refractive index greater than a refractive index of a lower layer.