Optical integrators for lithography systems and methods

• US 7,630,136 B2
• Filed: 07/18/2006
• Issued: 12/08/2009
• Est. Priority Date: 07/18/2006
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Joobeur, Abel, Ryzhikov, Lev, Shmarev, Yevgeniy Konstantinovich
• Primary Examiner(s): Schwartz; Jordan M.
• Assistant Examiner(s): JONES, JAMES
• Application Number:
  US11/488,174
• Publication Number:
  US 20080019008A1
• Time in Patent Office: 1,239 Days
• Field of Search: 359/629
• US Class Current: 359/629
• CPC Class Codes: G03F 7/70075 Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection

Abstract

An optical integrator having a first surface and a second surface that is used in a lithographic apparatus to modify light. The first surface is reflective, defines a volume, and is configured to be disposed in an optical illumination system along an optical axis, to surround the optical axis, and to reflect a light along a path incident upon the first surface. The second surface is disposed in the volume and has a first section of the second surface that is semi-reflective and is configured to reflect a first portion of a light along a path incident upon the first section of the second surface and to transmit a second portion of the light along the path incident upon the first section of the second surface. The second surface increases the number of reflections of the light to increase the uniformity of the intensity distribution of the light.

Claims

1. An optical integrator, comprising:

a first surface that is reflective and that defines a side of a volume, wherein the first surface and is configured to;

be disposed in an optical illumination system along an optical axis, and

surround the optical axis; and

a second surface disposed in the volume and having a section that is configured to reflect a first portion of a beam and to transmit a second portion of the beam, wherein the first surface is configured to reflect the first and second portions of the beam.

2. The optical integrator of claim 1, wherein the second surface is configured to increase at least one of a uniformity of an intensity distribution of the beam and a telecentricity of the beam.

3. The optical integrator of claim 1, wherein the optical illumination system is disposed in a lithographic apparatus.

4. The optical integrator of claim 1, wherein the section of the second surface is substantially all of the second surface.

5. The optical integrator of claim 4, wherein the second surface has a film of a material that causes reflection of the first portion of the beam along a path incident upon the second surface and transmission of the second portion of the beam along a path incident upon the second surface.

6. The optical integrator of claim 1, wherein the section is a first section and wherein the second surface has a second section that is reflective and is configured to reflect the beam along a path incident upon the second section of the second surface.

7. The optical integrator of claim 6, wherein:

the first section of the second surface has a film of a first material that causes reflection of the first portion of the beam along a path incident upon the first section of the second surface and transmission of the second portion of the beam along a path incident upon the first section of the second surface; and

the second section of the second surface has a film of a second material that causes reflection of the beam along the path incident upon the second section of the second surface.

8. The optical integrator of claim 1, wherein the section is a first section and wherein the second surface has a second section that is transmissive and is configured to transmit the beam along a path incident upon the second section of the second surface.

9. The optical integrator of claim 8, wherein:

the first section of the second surface has a film of a first material that causes reflection of the first portion of the beam along a path incident upon the first section of the second surface and transmission of the second portion of the beam along a path incident upon the first section of the second surface; and

the second section of the second surface has a film of a second material that causes transmission of the beam along the path incident upon the second section of the second surface.

13. The optical integrator of claim 1, wherein a shape of the first surface comprises a prism, a cylinder, or a frustum.

14. The optical integrator of claim 13, wherein the prism is a rectangular prism, the cylinder is an elliptic cylinder, or the frustum is a pyramidic frustum or a conic frustum.

15. The optical integrator of claim 1, wherein the volume is filled by a gas or a vacuum.

16. The optical integrator of claim 15, wherein the first portion of the beam along the path incident upon the first section of the second surface is substantially all of the beam along the path incident upon the first section of the second surface.

17. The optical integrator of claim 15, wherein the first section of the second surface is configured to transmit a second portion of the beam along the path incident upon the first section of the second surface.

10. An optical integrator, comprising:

a first surface that is reflective, defines a volume and is configured to be disposed in an optical illumination system along an optical axis, to surround the optical axis, and to reflect a light along a path incident upon the first surface; and

a second surface disposed in the volume and having only a first section of the second surface that is semi-reflective and is configured as a beam splitter, the volume comprises a first object, a second object and a third object, wherein,

the first, second, and third objects comprise respective first, second, and third materials that are transparent to a predetermined wavelength of radiation;

the first object and the second object define a first section of the first surface,

the second object defines the second surface, and

the third object defines a second section of the first surface and a third surface, the third surface being configured as a beam splitter.

11. The optical integrator of claim 10, wherein the first section of the first surface is substantially all of the first surface.

12. The optical integrator of claim 10, wherein a dimension of the second object is different from the dimension of the first object.

24. The optical integrator of claim 10, wherein the second material is the same as the first material.

18. An optical integrator, comprising:

a first and second reflective surfaces that together define a side of a volume and are configured to;

be disposed in an optical illumination system along an optical axis with the optical axis between the first surface and the second surface,

to reflect a beam along a path incident upon the first surface, and

to reflect the beam along a path incident upon the second surface; and

a third surface disposed in the volume and having a first section that is at least semi-reflective and is configured to reflect a first portion of the beam and transmit a second portion of the beam;

wherein the second surface is separate from the first surface and wherein each of the first and second surfaces are configured to reflect each of the first and second portions of the beam.

19. The optical integrator of claim 18, wherein the second surface is substantially parallel to the first surface.

20. The optical integrator of claim 18, wherein the second surface one of converges and diverges with the first surface in a direction along the optical axis.

21. A method for increasing at least one of a uniformity of an intensity distribution of a beam of light and a telecentricity of the beam, comprising:

reflecting the beam off of a first surface of an optical integrator along a path incident upon the first surface;

reflecting a first portion of the beam off of a first section of a second surface of the optical integrator along a path incident upon a first section of a second surface;

transmitting a second portion of the beam along the path incident upon the first section from the first section; and

reflecting the first and second portions of the beam off of the first surface;

wherein the first surface defines a side of a volume and the second surface is disposed in the volume.

22. The method of claim 21, wherein the volume is filled by a gas or a vacuum.

23. A method for increasing at least one of a uniformity of an intensity distribution of a beam of light and a telecentricity of the beam, comprising:

reflecting the beam off of a first surface of an optical integrator along a path incident upon the first surface;

reflecting the beam off of a second surface of the optical integrator along a path incident upon the second surface;

reflecting a first portion of the beam the beam off a first section of a third surface along a path incident upon a first section of a third surface; and

reflecting each of the first and second portions of the beam off of each of the first surface and second surfaces;

wherein the first surface and the second surface define a side of a volume,

wherein the second surface is separate from the first surface, and

wherein the third surface is disposed in the singular object.