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Optical integrators for lithography systems and methods

  • US 7,630,136 B2
  • Filed: 07/18/2006
  • Issued: 12/08/2009
  • Est. Priority Date: 07/18/2006
  • Status: Active Grant
First Claim
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1. An optical integrator, comprising:

  • a first surface that is reflective and that defines a side of a volume, wherein the first surface and is configured to;

    be disposed in an optical illumination system along an optical axis, andsurround the optical axis; and

    a second surface disposed in the volume and having a section that is configured to reflect a first portion of a beam and to transmit a second portion of the beam, wherein the first surface is configured to reflect the first and second portions of the beam.

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