×

Manufacturing process end point detection

  • US 7,630,786 B2
  • Filed: 03/07/2007
  • Issued: 12/08/2009
  • Est. Priority Date: 03/07/2007
  • Status: Active Grant
First Claim
Patent Images

1. A method for identifying a predetermined state of a manufacturing process by monitoring the process, comprising:

  • monitoring a plurality of variables that vary in value during the manufacturing process;

    mapping as points in a hyperspace the values of each variable at a plurality of times, where the hyperspace has a number of dimensions equal to the number of variables and the number of points is equal to the plurality of times;

    using a multivariate analysis method to project the points in the hyperspace in to a lower order hyperspace and the predefined location in the hyperspace in to the lower order hyperspace; and

    identifying that the manufacturing process has reached the predetermined state when one of the points reaches a location in the lower order hyperspace that is located within a predefined distance from the predefined location in the lower order hyperspace.

View all claims
  • 9 Assignments
Timeline View
Assignment View
    ×
    ×