Method and apparatus for micromachines, microstructures, nanomachines and nanostructures

• US 7,631,549 B1
• Filed: 08/20/2007
• Issued: 12/15/2009
• Est. Priority Date: 11/28/2001
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): Williams; Hezron
• Assistant Examiner(s): Frank; Rodney T
• Application Number:
  US11/842,031
• Time in Patent Office: 848 Days
• Field of Search: 731/05, 738/62, 738/626.34, 738/626.39, 735/041.5
• US Class Current: 73/105
• CPC Class Codes: F04C 2/18 with similar tooth forms F04C2/16 takes precedence
• CPC Class Codes: F05C 2203/06 Silicon
• CPC Class Codes: F05C 2203/0882 Carbon, e.g. graphite
• CPC Class Codes: G01Q 70/10 Shape or taper
• CPC Class Codes: Y10S 977/873 Tip holder
• CPC Class Codes: Y10T 74/20582 Levers

Abstract

Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Claims

1. A cantilever assembly suitable for use in a scanning probe microscope (SPM) comprising a holder and a lever extending from the holder, the lever having a first major surface, the lever further having an end portion distal the holder, the end portion having a recessed region formed on the first major surface, the recessed region being suitable for receiving an object or serving as a mount point for an object, wherein the holder includes a major surface having at least one recessed feature formed therein, the recessed feature having an opening that at least partially occludes an interior region of the recessed feature.