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Method and apparatus for micromachines, microstructures, nanomachines and nanostructures

  • US 7,631,549 B1
  • Filed: 08/20/2007
  • Issued: 12/15/2009
  • Est. Priority Date: 11/28/2001
  • Status: Expired due to Fees
First Claim
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1. A cantilever assembly suitable for use in a scanning probe microscope (SPM) comprising a holder and a lever extending from the holder, the lever having a first major surface, the lever further having an end portion distal the holder, the end portion having a recessed region formed on the first major surface, the recessed region being suitable for receiving an object or serving as a mount point for an object, wherein the holder includes a major surface having at least one recessed feature formed therein, the recessed feature having an opening that at least partially occludes an interior region of the recessed feature.

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