Microsystem, more particularly microgyrometer, with capacitive electrode detection element

• US 7,631,558 B2
• Filed: 08/09/2007
• Issued: 12/15/2009
• Est. Priority Date: 09/01/2006
• Status: Expired due to Fees

• Current Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Original Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Inventors: Diem, Bernard
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US11/889,182
• Publication Number:
  US 20080053226A1
• Time in Patent Office: 859 Days
• Field of Search: 735/041.2, 735/041.4, 735/041.6, 735/143.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames

Abstract

The microgyrometer is provided in a flat substrate and comprises detection means for detecting the movement of two oscillating masses in a measuring direction perpendicular to an excitation direction. The detection means comprise an excitation frame associated with each oscillating mass and a mobile detection element surrounded by a corresponding excitation frame and comprising a plurality of mobile electrodes, and first and second sets of interconnected fixed electrodes fixedly secured to the substrate on which they are formed. Each mobile electrode is disposed between associated fixed electrodes of the first and second sets to form two variable differential capacitors. The fixed electrodes of each set are interconnected by means of interconnection bars made of electrically conducting material extending above the fixed electrodes in a plane substantially parallel to the substrate.

Claims

1. A microsystem provided in a flat substrate and comprising:

at least two oscillating masses connected to the substrate by flexible suspension means,

excitation means for exciting said oscillating masses in a predetermined excitation direction,

and detection means for detecting movement of said oscillating masses in a measuring direction perpendicular to said excitation direction,

said detection means comprising an excitation frame associated with each oscillating mass, and a mobile detection element surrounded by the corresponding excitation frame and comprising a plurality of mobile electrodes, and first and second sets of interconnected fixed electrodes fixedly secured to the substrate on which they are formed, each mobile electrode being arranged between associated fixed electrodes of the first and second sets to form two variable differential capacitors,

wherein the fixed electrodes of each set are interconnected by means of interconnection bars made of electrically conducting material, extending above the fixed electrodes in a plane substantially parallel to the substrate.

2. The microsystem according to claim 1, wherein the interconnection bars are fixed by pads to the fixed electrodes.

3. The microsystem according to claim 1, wherein the interconnection bars are made of a material resistant to high temperatures.

4. The microsystem according to claim 1, wherein the interconnection bars are made of polysilicon or of silicon and germanium alloy.

5. The microsystem according to claim 1, wherein the interconnection bars are made of metal.

6. The microsystem according to claim 5, wherein in the metal is selected from aluminum, nickel, gold, and copper.

7. The microsystem according to claim 1, wherein the fixed electrodes are parallel to the excitation direction and the mobile electrodes are transverse branches of a frame constituting each mobile detection element.

8. The microsystem according to claim 1, wherein each mobile detection element is a frame of rectangular shape.

9. The microsystem according to claim 1, wherein each mobile detection element is a frame of circular shape.

10. The microsystem according to claim 1, wherein each mobile detection element is a frame of asymmetric shape.