Ink jet printhead with glass nozzle chambers
First Claim
Patent Images
1. An ink jet printhead comprising:
- a silicon substrate;
a CMOS layer comprising drive and control circuitry, said CMOS layer being formed on said silicon substrate;
a passivation layer covering said CMOS layer; and
a plurality of nozzles mounted on said passivation layer, each nozzle comprising;
a chamber adapted to contain an ejectable liquid; and
,at least one droplet ejection actuator associated with each of the chambers respectively, the droplet ejection actuator being electrically connected to the drive circuitry and adapted to eject a droplet of the ejectable liquid from the nozzle,wherein each chamber comprises a roof and sidewalls extending from said passivation layer to said roof, wherein said roof and said sidewalls are both comprised of a glass material.
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Abstract
An ink jet printhead is provided. The printhead comprises: a silicon substrate; a CMOS layer comprising drive and control circuitry, the CMOS layer being formed on the silicon substrate; a passivation layer covering the CMOS layer; and a plurality of nozzles mounted on the passivation layer. Each nozzle comprises a chamber adapted to contain an ejectable liquid; and a droplet ejection actuator associated with each of the chambers respectively, the droplet ejection actuator being electrically connected to the drive circuitry and adapted to eject a droplet of the ejectable liquid from the nozzle. The chambers are comprised of a glass material.
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Citations
4 Claims
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1. An ink jet printhead comprising:
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a silicon substrate; a CMOS layer comprising drive and control circuitry, said CMOS layer being formed on said silicon substrate; a passivation layer covering said CMOS layer; and a plurality of nozzles mounted on said passivation layer, each nozzle comprising; a chamber adapted to contain an ejectable liquid; and
,at least one droplet ejection actuator associated with each of the chambers respectively, the droplet ejection actuator being electrically connected to the drive circuitry and adapted to eject a droplet of the ejectable liquid from the nozzle, wherein each chamber comprises a roof and sidewalls extending from said passivation layer to said roof, wherein said roof and said sidewalls are both comprised of a glass material. - View Dependent Claims (2, 3, 4)
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Specification