Gas providing member and processing device

• US 7,632,356 B2
• Filed: 03/13/2006
• Issued: 12/15/2009
• Est. Priority Date: 03/16/2005
• Status: Active Grant

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Unno, Yutaka, Tomita, Yasumitsu
• Primary Examiner(s): Hassanzadeh; Parviz
• Assistant Examiner(s): Chandra; Satish
• Application Number:
  US11/374,529
• Publication Number:
  US 20060207509A1
• Time in Patent Office: 1,373 Days
• Field of Search: 118/715, 118/719, 118/725, 118/728, 219/385, 156/345.33, 156/345.34
• US Class Current: 118/728
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile

Abstract

A gas providing member includes a body portion which forms a gas providing passage between the body portion and a processing member which holds the processing target, and the gas providing passage provides gas onto a processing target. In the body portion, a gas reservoir portion located in the gas providing passage is formed.

Claims

1. A gas providing member, comprising:

a processing member which holds a processing target, the processing member including a heating member which performs heating processing for the processing target;

a body portion comprising an upper plate portion that forms a gas providing passage between the upper plate portion and a step difference portion of the processing member;

a first gas reservoir portion formed in the upper part of said body portion parallel to an upper surface of the processing member; and

a second gas reservoir portion formed substantially at the other lower end of said body portion parallel to the upper surface of the processing member.

2. The gas providing member according to claim 1, wherein the body portion includes a tubular portion which forms the gas providing passage between the tubular portion and a side surface of the processing member.

3. The gas providing member according to claim 1, wherein the first gas reservoir portion is formed at a position in the gas providing passage where a flowing direction of the gas is changed and the second gas reservoir portion is formed at a position in the gas provided passage where the flowing direction of the gas is changed.

4. The gas providing member according to claim 1, wherein the gas reservoir portion is formed in a downstream portion of a gas flow in the gas providing passage.

5. The gas providing member according to claim 1, wherein the body portion is formed of ceramics.

6. The gas providing member according to claim 1, wherein a width of the gas providing passage is 2 mm to 20 mm in a crosswise direction.

7. The gas providing member according to claim 6, wherein the width of the gas providing passage is 2 mm to 10 mm in a crosswise direction.

8. The gas providing member according to claim 1, wherein the width of the first gas reservoir portion is 1 mm to 10 mm and a depth of the first gas reservoir portion is 1 mm to 10 mm and the width of the second gas reservoir portion is 1 mm to 10 mm and the depth of the second gas reservoir portion is 1 mm to 10 mm.

9. The gas providing member according to claim 1, wherein the gas providing passage extends in a direction that is substantially perpendicular to a surface of the processing member that holds the processing target.

10. The gas providing member according to claim 1, wherein said first and second gas reservoir portions are formed entirely within the body portion.

11. The gas providing member according to claim 1, wherein flow turbulence in the gas is generated in said first and second gas reservoir portions to reduce flow turbulence in the gas provided to the processing target.

12. A processing device, comprising:

a processing member which holds a processing target, the processing member including a heating member which performs heating processing for the processing target; and

a gas providing member disposed at a predetermined interval from the processing member on an outer circumference side of the processing member, wherein the gas providing member includes a body portion, comprising an upper plate portion that forms a gas providing passage between the upper plate portion and a step difference portion of the processing member;

a first gas reservoir portion formed in the upper part of said body portion parallel to an upper surface of the processing member; and

a second gas reservoir portion formed substantially at the lower end of said body portion parallel to the upper surface of the processing member.