Method and apparatus for atomic layer deposition (ALD) in a proximity system

• US 7,632,376 B1
• Filed: 06/30/2005
• Issued: 12/15/2009
• Est. Priority Date: 09/30/2002
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Korolik, Mikhail, Ravkin, Mike, Wilcoxson, Mark
• Primary Examiner(s): DEO, DUY VU NGUYEN
• Application Number:
  US11/173,729
• Time in Patent Office: 1,629 Days
• Field of Search: None
• US Class Current: 156/345.1
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 17/02 Tanks; Installations therefor
• CPC Class Codes: C25D 21/10 Agitating of electrolytes; Moving of racks
• CPC Class Codes: C25D 5/08 Electroplating with moving electrolyte e.g. jet electroplating using locally applied jets of electrolyte C25D5/026
• CPC Class Codes: C25D 5/22 Electroplating combined with mechanical treatment during the deposition
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like
• CPC Class Codes: H01L 21/67034 for drying
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

An apparatus for processing a substrate is provided which includes a first process window configured to apply a first fluid meniscus between the first process window and a surface of the substrate. The apparatus further includes a second process window configured to generate a second fluid meniscus between the second process window and the surface of the substrate. The apparatus further includes a third process window configured to generate a third fluid meniscus between the third process window and the surface of the substrate. The apparatus is configured to apply the first fluid meniscus, the second fluid meniscus, and the third fluid meniscus to the surface of the substrate in order during an atomic layer deposition operation.

Claims

1. An apparatus for processing a substrate, comprising:

a first process window configured to apply a first fluid meniscus between the first process window and a surface of the substrate;

a second process window configured to generate a second fluid meniscus between the second process window and the surface of the substrate; and

a third process window configured to generate a third fluid meniscus between the third process window and the surface of the substrate;

wherein the apparatus is configured to apply the first fluid meniscus, the second fluid meniscus, and the third fluid meniscus to the surface of the substrate in order during an atomic layer deposition operation, wherein each of the first, second and third process windows are coupled to a manifold.

2. An apparatus for processing a substrate as recited in claim 1, where the first process window includes a first set of conduits configured to generate the first fluid meniscus.

3. An apparatus for processing a substrate as recited in claim 2, where the first set of conduits includes at least one inlet configured to apply the first fluid to the surface of the substrate and at least one outlet configured to remove the first fluid from the surface of the substrate.

4. An apparatus for processing a substrate as recited in claim 3, where the first set of conduits further includes at least one additional inlet configured to apply surface tension reducing fluid to the surface of the substrate.

5. An apparatus for processing a substrate as recited in claim 2, where the second process window includes a second set of conduits configured to generate the second fluid meniscus.

6. An apparatus for processing a substrate as recited in claim 5, where the second set of conduits includes at least one inlet configured to apply a second fluid to the surface of the substrate and at least one outlet configured to remove the second fluid from the surface of the substrate.

7. An apparatus for processing a substrate as recited in claim 6, where the second set of conduits further includes the at least one additional inlet configured to apply the surface tension reducing fluid to the surface of the substrate.

8. An apparatus for processing a substrate as recited in claim 2, where the third process window includes a third set of conduits configured to generate the third fluid meniscus.

9. An apparatus for processing a substrate as recited in claim 8, where the third set of conduits includes at least one inlet configured to apply a third fluid to the surface of the substrate and at least one outlet configured to remove the third fluid from the surface of the substrate.

10. An apparatus for processing a substrate as recited in claim 7, where the second set of conduits further includes the at least one additional inlet configured to apply the surface tension reducing fluid to the surface of the substrate.

11. An apparatus for processing a substrate as recited in claim 1, wherein the first fluid meniscus is configured to apply a chemical precursor used in atomic layer deposition to the surface of the substrate.

12. An apparatus for processing a substrate as recited in claim 1, wherein the second fluid meniscus is configured to apply one of deionized water, carbon tetrachloride, anhydrous iso-propanol, anhydrous propanol, or anhydrous ethanol to the surface of the substrate.

13. An apparatus for processing a substrate as recited in claim 11, where the third fluid meniscus is configured to apply a chemical configured to react with the chemical precursor to generate an atomic layer of a reactant on the surface of the substrate.

14. An apparatus for processing a substrate, comprising:

a first set of conduits defined on a surface of the apparatus configured to apply a first fluid meniscus between the first set of conduits and a surface of the substrate;

a second set of conduits defined on the surface of the apparatus configured to generate a second fluid meniscus between the second set of conduits and the surface of the substrate; and

a third set of conduits configured to generate a third fluid meniscus between the third set of conduits and the surface of the substrate;

wherein the apparatus is configured to apply the first fluid meniscus, the second fluid meniscus, and the third fluid meniscus to the surface of the substrate in order during an atomic layer deposition operation, and the first, second and third conduits are each coupled to a manifold.

15. An apparatus for processing a substrate as recited in claim 14, where the first set of conduits includes at least one inlet configured to apply the first fluid to the surface of the substrate and at least one outlet configured to remove the first fluid from the surface of the substrate.

16. An apparatus for processing a substrate as recited in claim 15, where the first set of conduits further includes at least one additional inlet configured to apply surface tension reducing fluid to the surface of the substrate.

17. An apparatus for processing a substrate as recited in claim 14, where the second set of conduits includes at least one inlet configured to apply a second fluid to the surface of the substrate and at least one outlet configured to remove the second fluid from the surface of the substrate.

18. An apparatus for processing a substrate as recited in claim 17, where the second set of conduits further includes the at least one additional inlet configured to apply the surface tension reducing fluid to the surface of the substrate.

19. An apparatus for processing a substrate as recited in claim 14, where the third set of conduits includes at least one inlet configured to apply a third fluid to the surface of the substrate and at least one outlet configured to remove the third fluid from the surface of the substrate.

20. An apparatus for processing a substrate as recited in claim 19, where the second set of conduits further includes the at least one additional inlet configured to apply the surface tension reducing fluid to the surface of the substrate.

21. An apparatus for processing a substrate as recited in claim 14, wherein the first fluid meniscus is configured to apply a chemical precursor used in atomic layer deposition to the surface of the substrate.

22. An apparatus for processing a substrate as recited in claim 14, wherein the second fluid meniscus is configured to apply one of deionized water, carbon tetrachloride, anhydrous iso-propanol, anhydrous propanol, or anhydrous ethanol to the surface of the substrate.

23. An apparatus for processing a substrate as recited in claim 21, where the third fluid meniscus is configured to apply a chemical configured to react with the chemical precursor to generate an atomic layer of a reactant on the surface of the substrate.