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Fet sensor with specially configured gate electrode for the highly sensitive detection of analytes

  • US 7,632,670 B2
  • Filed: 12/14/2002
  • Issued: 12/15/2009
  • Est. Priority Date: 12/21/2001
  • Status: Expired due to Fees
First Claim
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1. A sensor for the detection of an analyte, the sensor comprisinga substrate forming a first plate of a first capacitor,a source contact region on the substrate,a drain contact region on the substrate,a gate oxide of a transistor on the substrate between the source contact region and the drain contact region and forming an insulator of the first capacitor,a gate electrode having inner and outer faces, the inner face being smaller than the outer face and forming a second plate of the first capacitor, the outer face forming a first plate of a second capacitor connected in series with the first capacitor, the gate-electrode inner face contacting the gate oxide over a predetermined inner contact area;

  • an electrically insulating detection electrode forming an insulator of the second capacitor and having inner and outer faces, the detection-electrode inner face contacting the gate-electrode outer face;

    an immobilized receptor fixed on the detection-electrode outer face for detecting a presence of the analyte and forming a second plate of the second capacitor; and

    an insulator body potting all of the source contact region, drain contact region, gate electrode, and gate oxide and the detection electrode except at the detection-electrode outer face carrying the immobilized receptor to form a series circuit of the two capacitors and increase a charge density toward the transistor to enhance a detection sensitivity of the transistor.

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