Magnetic bearing device and vacuum pump
First Claim
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1. A magnetic bearing device for rotatably supporting a rotor for rotation about a rotation axis, the magnetic bearing device comprising:
- a first active radial bearing;
a second active radial bearing;
at least one first radial displacement sensor; and
an axial bearing,wherein at least a part of the axial bearing is disposed between the first active radial bearing and the at least one first radial displacement sensor when viewed in an orthogonal projection onto the rotation axis, andwherein the first active radial bearing is disposed between the axial bearing and the second active radial bearing when viewed in an orthogonal projection onto the rotation axis.
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Accused Products
Abstract
A magnetic bearing device (1) for rotatably supporting a shaft (20) for rotation about a rotation axis (101) is disclosed. The device (1) comprises a first active radial bearing (5), one or more first radial displacement sensors (81), and an axial bearing (6, 7). At least a part of the axial bearing (6, 7) is disposed between the first active radial bearing (5) and the first radial displacement sensors (81) when viewed in an orthogonal projection onto the rotation axis (101). A vacuum pump including the magnetic bearing device (1) and a multiple-sensing unit (8) are also disclosed.
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Citations
11 Claims
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1. A magnetic bearing device for rotatably supporting a rotor for rotation about a rotation axis, the magnetic bearing device comprising:
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a first active radial bearing; a second active radial bearing; at least one first radial displacement sensor; and an axial bearing, wherein at least a part of the axial bearing is disposed between the first active radial bearing and the at least one first radial displacement sensor when viewed in an orthogonal projection onto the rotation axis, and wherein the first active radial bearing is disposed between the axial bearing and the second active radial bearing when viewed in an orthogonal projection onto the rotation axis. - View Dependent Claims (2, 3, 4, 5, 7, 8, 9, 10)
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6. A vacuum pump, comprising:
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a magnetic bearing device; and a rotor rotatably supported in the magnetic bearing device, wherein the magnetic bearing device comprises; a first active radial bearing; a second active radial bearing; at least one first radial displacement sensor; and an axial bearing, wherein at least a part of the axial bearing is disposed between the first active radial bearing and the at least one first radial displacement sensor when viewed in an orthogonal projection onto the rotation axis, and wherein the first active radial bearing is disposed between the axial bearing and the second active radial bearing when viewed in an orthogonal projection onto the rotation axis. - View Dependent Claims (11)
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Specification