Inspection apparatus using terahertz wave
First Claim
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1. An inspection apparatus comprising:
- a substrate having integrated therein a structure for holding an inspected object;
an electromagnetic terahertz wave transmitting portion having an antenna structure for irradiating the inspected object with an electromagnetic terahertz wave; and
an electromagnetic terahertz wave receiving portion having an antenna structure for receiving the electromagnetic terahertz wave,wherein the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion are disposed on opposite sides of the substrate facing each other with the substrate therebetween and are in contact with the substrate, andthe structure for holding the inspected object is between the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion.
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Abstract
An inspection apparatus has a configuration which can suppress attenuation of an electromagnetic wave caused by an environment surrounding the inspection apparatus and can readily prevent an unwanted substance from being contaminated into a propagation path of the electromagnetic wave. The inspection apparatus includes a substrate having therein a structure for holding an inspected object, an electromagnetic wave transmitting portion having an antenna structure and an electromagnetic wave receiving portion having an antenna structure. The electromagnetic wave transmitting portion and the electromagnetic wave receiving portion are disposed in contact with the substrate.
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Citations
12 Claims
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1. An inspection apparatus comprising:
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a substrate having integrated therein a structure for holding an inspected object; an electromagnetic terahertz wave transmitting portion having an antenna structure for irradiating the inspected object with an electromagnetic terahertz wave; and an electromagnetic terahertz wave receiving portion having an antenna structure for receiving the electromagnetic terahertz wave, wherein the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion are disposed on opposite sides of the substrate facing each other with the substrate therebetween and are in contact with the substrate, and the structure for holding the inspected object is between the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An inspection apparatus comprising:
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a substrate having integrated therein a structure for holding an inspected object; an electromagnetic terahertz wave transmitting portion having an antenna structure for irradiating the inspected object with an electromagnetic terahertz wave; an electromagnetic terahertz wave receiving portion having an antenna structure for receiving the electromagnetic terahertz wave; and an inspected object insertion means for inserting the inspected object from outside the structure, wherein the electromagnetic terahertz wave transmitting portion and the electromagnetic terahertz wave receiving portion are disposed to face each other with the substrate therebetween, and are in contact with the substrate, and the inspected object insertion means uses physical phenomenon at an interface, corresponding to a capillary phenomenon, to perform insertion.
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Specification