Tuning optical cavities

• US 7,633,629 B2
• Filed: 02/05/2007
• Issued: 12/15/2009
• Est. Priority Date: 02/05/2007
• Status: Expired due to Fees

• Current Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Original Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Inventors: Kiesel, Peter, Bassler, Michael, Schmidt, Oliver, Srinivasan, Uma
• Primary Examiner(s): Lee; Hwa (Andrew) S
• Application Number:
  US11/702,321
• Publication Number:
  US 20080186508A1
• Time in Patent Office: 1,044 Days
• Field of Search: 356/454, 356/519, 356/480, 356/517
• US Class Current: 356/519
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01N 2021/451 for determining the optical absorption
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A tunable optical cavity can be tuned by relative movement between two reflection surfaces, such as by deforming elastomer spacers connected between mirrors or other light-reflective components that include the reflection surfaces. The optical cavity structure includes an analyte region in its light-transmissive region, and presence of analyte in the analyte region affects output light when the optical cavity is tuned to a set of positions. Electrodes that cause deformation of the spacers can also be used to capacitively sense the distance between them. Control circuitry that provides tuning signals can cause continuous movement across a range of positions, allowing continuous photosensing of analyte-affected output light by a detector.

Claims

1. An optical cavity device comprising:

first and second light-reflective components with a light-transmissive region between them, each of the light-reflective components being structured to reflect light into the light-transmissive region;

a tuning structure that is structured to respond to tuning signals by moving the first and second light-reflective components among a set of positions relative to each other;

the tuning structure including;

one or more deformable components connected so that deformation of at least one of the deformable components causes the first and second light-reflective components to move within the set of positions; and

at least one signal-responsive component that receives the tuning signals and, in response, causes deformation of at least one of the deformable components;

the light-transmissive region including an analyte region, the analyte region being bounded in part by at least one of the deformable components; and

a fluidic component that, in operation, provides an analyte in the analyte region;

the set of positions including a subset of one or more positions in which the first and second light-reflective components and the light-transmissive region with analyte from the fluidic component in the analyte region are configured to operate as an optical cavity that provides analyte-affected output light, the analyte-affected output light including information about one or more optical characteristics of the analyte.

2. The device of claim 1, further comprising:

control circuitry that provides tuning signals that cause the tuning structure to change relative positions of the first and second light-reflective components at a tuning frequency.

3. A system comprising the device of claim 2, further comprising:

a photosensing component that, in response to control signals, photosenses the optical cavity'"'"'s output light and provides sensing results with a readout frequency;

the control circuitry further providing control signals to the photosensing component, the tuning signals and the control signals locking in the tuning frequency and the readout frequency.

4. The device of claim 1 in which the first and second light-reflective components include the first and second reflection surfaces, respectively;

in moving the first and second light-reflective components, the tuning structure moving the first and second reflection surfaces relative to each other.

5. The device of claim 1 in which the set of positions includes a range of continuously varying relative positions;

the tuning structure being structured to change relative positions of the first and second light-reflective components continuously across the range.

6. The device of claim 5 in which the optical cavity provides analyte-affected output light while the tuning structure changes relative positions of the first and second light-reflective components continuously across the range, the output light indicating continuous values of an optical characteristic of the analyte across a range of photon energies.

7. The device of claim 6 in which the optical characteristic is one of refractive index and absorption coefficient.

8. The device of claim 1 in which each deformable component is elastically deformable.

9. The device of claim 1 in which the analyte region is defined in one of the deformable components.

10. The device of claim 1 in which the first and second light-reflective components include first and second facing surfaces, respectively, the first and second facing surfaces each having a respective reflective coating.

11. The device of claim 1 in which the one or more deformable components include one or more elastomer spacers between the first and second light-reflective components.

12. The device of claim 11 in which the elastomer spacers include poly-di-methyl-siloxane.

13. The device of claim 11 in which the elastomer spacers include electroactive elastomer material.

14. The device of claim 11 in which the analyte region is bounded by the elastomer spacers.

15. The device of claim 1 in which the analyte region is a channel;

the fluidic component causing the analyte to be fluidically carried through the channel.

16. The device of claim 1 in which the tuning structure further includes:

one or more sensing components structured to provide shape sense signals indicating shape of one of the deformable components.

17. The device of claim 1 in which the signal-responsive components include:

first and second electrodes connected to opposite surfaces of one of the deformable components.

18. The device of claim 1 in which the analyte-affected output light has a laterally varying intensity distribution.

19. The device of claim 1 in which the optical cavity provides output light at an exit surface, the device further comprising:

a photosensing component with a photosensitive surface;

the exit surface being on or over the photosensitive surface.

20. A system comprising the device of claim 1, the system further comprising:

control circuitry connected to the signal-responsive component, the control circuitry providing the tuning signals.

21. The system of claim 20 in which the tuning structure further includes:

one or more sensing components structured to provide shape sense signals indicating shape of one or more of the deformable components;

the control circuitry receiving the shape sense signals and providing the tuning signals based on the shape sense signals.

22. The system of claim 21 in which the sensing components include:

first and second electrodes connected to opposite surfaces of the deformable component;

the control circuitry measuring capacitance between the first and second electrodes to sense the deformable component'"'"'s shape.

23. An optical cavity device comprising:

first and second structures that include first and second light-reflective components, respectively;

between the first and second light-reflective components, an in homogeneous optical cavity;

each of the light-reflective components being structured to reflect light into the inhomogeneous optical cavity;

connected to the first and second structures, a set of one or more tuning structures that are structured to move the first and second structures among a set of positions relative to each other;

at least one of the tuning structures in the set including;

first and second electrodes connected to the first and second structures, respectively, the first and second electrodes being connectible to receive electrical tuning signals; and

a respective deformable component between the first and second electrodes;

the deformable component being deformable in response to the electrical tuning signals received by the first and second electrodes the deformable component being connected so that deformation of the deformable component causes the first and second structures to move within the set of positions;

an analyte region within the inhomogeneous optical cavity, the analyte region being bounded in part by the respective deformable component of at least one of the tuning structures; and

a fluidic component that, in operation, provides an analyte in the analyte region;

the optical cavity device being structured so that, in a subset of one or more positions in the set of positions, presence of the analyte in the analyte region affects the inhomogeneous optical cavity'"'"'s output light and the output light includes information about one or more optical characteristics of the analyte.

24. The device of claim 23 in which the first and second electrodes of each tuning structure in the set are on facing surfaces of the first and second structures, respectively.

25. The device of claim 23 in which the deformable component includes at least one of:

dielectric elastomer material that is deformed in response to an electrostatic field between electrodes;

nonmagnetic elastomer material that is deformed by electromagnetic attraction or repulsion between electrodes; and

piezoelectric material that expands or contracts in response to electrical signals received through electrodes.

26. The device of claim 23 in which the set of tuning structures, by moving the first and second structures, changes the optical cavity'"'"'s shape by doing at least one of changing a tilt angle and changing an optical distance.

27. The device of claim 23 in which the optical cavity device has an exit surface at which it provides the in homogeneous optical cavity'"'"'s output light, the device further comprising:

a photosensing component connected to the exit surface to receive the output light.

28. A system that comprises the device of claim 23, the system further comprising:

one or more sensing components structured to sense a feature of relative position of the first and second light-reflective components and provide feature signals indicating the sensed feature; and

control circuitry connected to receive the feature signals;

in response to the feature signals, the control circuitry providing the electrical tuning signals to the set of tuning structures.

29. The system of claim 28 in which the control circuitry comprises a processor, the processor providing the electrical tuning signals based on the feature signals and on calibration data.

30. The system of claim 28 in which the sensing components sense distance between the first and second light-reflective components.