Apparatus and methods for nanolithography using nanoscale optics
First Claim
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1. A de-magnifying lens for use in a standard photolithography system comprising:
- a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and
an array of carbon nanotubes penetrating and converging through the film through the plurality of cylindrical channels,wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes,wherein each carbon nanotube connects a light-receiving pixel on the top surface of the film with a light-emitting pixel on the bottom surface of the film, andwherein the light-receiving pixels on the top surface of the film are indirectly mapped to the light-emitting pixels on the bottom surface of the film by scrambled wiring through a nano-coaxial transmission line.
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Abstract
An apparatus and methods for nanolithography using nanoscale optics are disclosed herein. Submicron-scale structures may be obtained using standard photolithography systems with a de-magnifying lens. A de-magnifying lens for use in a standard photolithography system includes a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and an array of carbon nanotubes penetrating the film through the plurality of cylindrical channels, wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes.
202 Citations
24 Claims
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1. A de-magnifying lens for use in a standard photolithography system comprising:
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a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and an array of carbon nanotubes penetrating and converging through the film through the plurality of cylindrical channels, wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes, wherein each carbon nanotube connects a light-receiving pixel on the top surface of the film with a light-emitting pixel on the bottom surface of the film, and wherein the light-receiving pixels on the top surface of the film are indirectly mapped to the light-emitting pixels on the bottom surface of the film by scrambled wiring through a nano-coaxial transmission line. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A nanolithography apparatus comprising:
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a metallic film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and an array of nanorods penetrating the metallic film through the plurality of cylindrical channels, the array of nanorods having a protruding portion that extends beyond a surface of the metallic film and an embedded portion that is within the metallic film, wherein each nanorod connects a light-receiving pixel on the top surface of the film with a light-emitting pixel on the bottom surface of the film, and wherein the light-receiving pixels on the top surface of the film are indirectly mapped to the light-emitting pixels on the bottom surface of the film by scrambled wiring through a nano-coaxial transmission line. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A de-magnifying lens for use in nanolithography comprising:
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a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material coated with a conductor; and an array of nanorods penetrating and converging through the film through the plurality of cylindrical channels, wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the nanorods, wherein each nanorod connects a light-receiving pixel on the top surface of the film with a light-emitting pixel on the bottom surface of the film, and wherein the light-receiving pixels on the top surface of the film are indirectly mapped to the light-emitting pixels on the bottom surface of the film by scrambled wiring through a nano-coaxial transmission line. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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Specification