Plasma processing apparatus and methods for removing extraneous material from selected areas on a substrate

• US 7,635,418 B2
• Filed: 12/03/2004
• Issued: 12/22/2009
• Est. Priority Date: 12/03/2004
• Status: Active Grant

• Current Assignee: Nordson Corporation
• Original Assignee: Nordson Corporation
• Inventors: Getty, James D., Tyler, James S., Condrashoff, Robert S.
• Primary Examiner(s): Lund; Jeffrie R.
• Assistant Examiner(s): Chandra; Satish
• Application Number:
  US11/003,062
• Publication Number:
  US 20060118239A1
• Time in Patent Office: 1,845 Days
• Field of Search: 156/345.3, 118/715, 118/720, 118/721, 118/504, 118/505
• US Class Current: 156/345.3
• CPC Class Codes: C23F 4/00 Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Apparatus and methods for shielding a feature projecting from a first area on a substrate to a plasma while simultaneously removing extraneous material from a different area on the substrate with the plasma. The apparatus includes at least one concavity positioned and dimensioned to receive the feature such that the feature is shielded from the plasma. The apparatus further includes a window through which the plasma removes the extraneous material. The method generally includes removing the extraneous material while shielding the feature against plasma exposure.

Claims

1. A shielding assembly for holding a first substrate during treatment with a plasma, the first substrate having a first side, a plurality of features projecting from the first side, a second side opposite to the first side, and an extraneous material on the second side, said shielding assembly comprising:

a first mask including a plurality of concavities each positioned and dimensioned to receive a respective one of plurality of features projecting from the first side of the first substrate, and said first mask defining a seal with the first substrate about each of said plurality of concavities to prevent the ingress of the plasma into said plurality of concavities;

an upper frame including a plurality of windows for passing the plasma into contact with the extraneous material on the second side of the first substrate to remove the extraneous material, each of said windows including a first side edge, a second side edge, and a plurality of cross members extending between said first and second side edges, and said cross members positioned such that the second side of the first substrate is at least partially exposed; and

a lower plate including an annular rim projecting toward said upper frame and a recess defined below a plane containing said rim, and said recess configured to receive said first mask so that said first mask is located between said upper frame and said lower plate.

2. The shielding assembly of claim 1 wherein said lower plate and said upper frame are formed from an electrically-conductive material, and said annular rim of said lower plate and said upper frame have a contacting relationship adequate for electrical conduction.

3. The shielding assembly of claim 1 wherein said first mask contacts the first side of the first substrate about a perimeter of each of said plurality of concavities.

4. The shielding assembly of claim 1 wherein said lower plate is positioned relative to said first mask such that the first substrate is located between said first mask and said lower plate.

5. The shielding assembly of claim 1 further comprising:

a second mask including a plurality of concavities positioned and dimensioned to receive the features projecting from a first side of a second substrate, and said second mask defining a seal with the second substrate about each of said plurality of concavities of said second mask to prevent the ingress of the plasma into said plurality of concavities of said second mask.

6. the shielding assembly of claim 5 wherein said first mask, the first substrate, said second mask, and the second substrate are registered with one of said windows in said upper frame.

7. the shielding assembly of claim 5 wherein said first mask, the first substrate, said second mask, and the second substrate are registered with different windows in said upper frame.