MEMS scanner adapted to a laser printer

• US 7,636,101 B2
• Filed: 08/09/2006
• Issued: 12/22/2009
• Est. Priority Date: 02/09/2005
• Status: Expired due to Fees

• Current Assignee: Microvision, Inc.
• Original Assignee: Microvision, Inc.
• Inventors: Koga, Yoshiro, Abe, Nobumasa, Brown, Dean R., Nomura, Yujiro, Sprague, Randall B., Davis, Wyatt O.
• Primary Examiner(s): PHAM, HAI CHI
• Application Number:
  US11/502,131
• Publication Number:
  US 20070109560A1
• Time in Patent Office: 1,231 Days
• Field of Search: 347/239, 347/255, 347/231, 347/243, 347/259, 347/260, 347/241, 347/256, 359/224, 359/17, 359/213.1, 359/214.1, 359/202.2, 345/32
• US Class Current: 347/243
• CPC Class Codes: B41J 2/471 using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means

Abstract

An electrophotographic printer includes an exposure unit having a MEMS scanner operable to scan a beam of light across a photoconductor. The MEMS scanner includes a mirror having an aspect ratio similar to the shape of the facets of a conventional rotating polygon scanner. In a preferred embodiment, the scan mirror has a length of about 750 microns in a dimension parallel to its axis of rotation and a length of about 8 millimeters in a dimension perpendicular to its axis of rotation. The MEMS scanner is operable to scan at a frequency of about 5 KHz and an angular displacement of about 20 degrees zero-to-peak mechanical scan angle.

Claims

1. A MEMS scanner for a laser printer;

comprising;

a silicon scan plate having a lateral dimension greater than about 4 times its longitudinal dimension;

first and second opposed torsion arms, each torsion arm coupled to the scan plate and extending longitudinally from a proximal to a distal point, the first and second torsion arms defining an axis of rotation of the scan plate;

first and second opposed mounting structures, each mounting structure coupled to a distal point of a respective torsion arm; and

first and second suspensions interposed between the scan plate and respective first and second torsion arms, the first and second suspensions forming a torque spreading apparatus operative to maintain dynamic flatness of the mirror during operation of the MEMS scanner, wherein the first and second suspensions include respective first and second suspension beams and the first and second suspension beams are coupled to the silicon scan plate by respective center connectors and first and second lateral connectors.

2. The MEMS scanner for a laser printer of claim 1;

wherein the silicon scan plate has a lateral dimension greater than about 8 times its longitudinal dimension.

3. The MEMS scanner for a laser printer of claim 2;

wherein the silicon scan plate has a lateral dimension of about 8 millimeters and a longitudinal dimension of about 750 microns.

4. The MEMS scanner for a laser printer of claim 1;

wherein the silicon scan plate and first and second opposed torsion arms are about 700 micrometers thick.

5. The MEMS scanner for a laser printer of claim 1;

wherein the first and second opposed torsion arms each has a length greater than about 8 millimeters.

6. The MEMS scanner for a laser printer of claim 5;

wherein the first and second opposed torsion arms each has a length of about 8.76 millimeters.

7. The MEMS scanner for a laser printer of claim 1;

wherein the first and second opposed torsion arms each has a width of about 384 micrometers.

8. The MEMS scanner for a laser printer of claim 1;

wherein the first and second opposed torsion arms each has a thickness greater its width.

9. The MEMS scanner for a laser printer of claim 1;

wherein the longitudinal dimension of the scan plate is greater than half its thickness and smaller than twice its thickness.

10. The MEMS scanner for a laser printer of claim 1;

wherein the first and second opposed mounting structures further include;

first and second opposed T-bars, each T-bar coupled to a distal point of a respective torsion arm and extending laterally in opposing directions from an axial to two equidistant lateral points therefrom; and

first, second, third, and fourth mounting pads, each mounting pad coupled to a respective equidistant lateral point of a T-bar.

11. The MEMS scanner for a laser printer of claim 10;

wherein the first torsion bar is coupled to the first T-bar with first and second elliptical fillets at the point of coupling.

12. The MEMS scanner for a laser printer of claim 11;

wherein the first and second elliptical fillets have a dimension of about 400 micrometers along the torsion arm and about 200 micrometers along the T-bar.

13. The MEMS scanner for a laser printer of claim 10;

wherein the equidistant lateral points of the T-bars are offset toward the silicon scan plate in a longitudinal direction compared to the distal point of the torsion arms.

14. The MEMS scanner for a laser printer of claim 10;

further comprising at least one stacked piezo-electric actuator aligned vertically with at least one mounting pad.

15. The MEMS scanner for a laser printer of claim 14;

wherein the at least one stacked piezo-electric actuator includes two stacked piezo-electric actuators, each vertically aligned with a respective mounting pad.

16. The MEMS scanner for a laser printer of claim 14;

wherein the at least one stacked piezo-electric actuator includes four stacked piezo-electric actuators, each vertically aligned with a respective mounting pad.

17. The MEMS scanner for a laser printer of claim 10;

further comprising;

a housing to which the first, second, third, and fourth mounting pads are clamped.

18. The MEMS scanner of claim 17;

wherein;

the third and fourth mounting pads are clamped directly to the housing;

the first and second mounting pads are clamped to respective first and second stacked piezo-electric actuators; and

the first and second stacked piezo-electric actuators are held in contact with the housing.

19. The MEMS scanner of claim 17;

wherein the first, second, third, and fourth mounting pads are clamped to respective first, second, third, and fourth stacked piezo-electric actuators; and

the first, second, third, and fourth piezo-electric actuators are held in contact with the housing.

20. The MEMS scanner of claim 19;

wherein the first, second, third and fourth mounting pads are clamped to the respective first, second, third, and fourth stacked piezo-electric actuators so as to provide a pre-loaded compressive force on the respective stacked piezo-electric actuators.

21. The MEMS scanner for a laser printer of claim 17;

further comprising a laser printer exposure unit to which the housing is mounted.

22. The MEMS scanner for a laser printer of claim 1;

wherein the scan plate is operable to periodically rotate back-and-forth around the axis of rotation defined by the first and second torsion arms at a frequency greater than about 1 KHz.

23. The MEMS scanner for a laser printer of claim 22;

wherein the scan plate is operable to periodically rotate back-and-forth around the axis of rotation defined by the first and second torsion arms at a frequency of about 5 KHz.

24. The MEMS scanner for a laser printer of claim 1;

wherein the scan plate is operable to periodically rotate back-and-forth around the axis of rotation defined by the first and second torsion arms to a rotational displacement greater than about 10 degrees mechanical zero-to-peak scan angle.

25. The MEMS scanner for a laser printer of claim 24;

wherein the scan plate is operable to periodically rotate back-and-forth around the axis of rotation defined by the first and second torsion arms to a rotational displacement of about 20 degrees mechanical zero-to-peak scan angle.

26. The MEMS scanner for a laser printer of claim 1;

wherein the first and second suspension beams each have a longitudinal dimension smaller than the longitudinal dimension of the silicon scan plate.

27. The MEMS scanner for a laser printer of claim 1;

wherein the MEMS scanner is photolithographically formed from a silicon wafer.

28. The MEMS scanner for a laser printer of claim 1, wherein the silicon scan plate, the first and second opposed torsion arms, and the first and second opposed mounting structures are formed having a constant thickness corresponding to the thickness of a silicon wafer.

29. The MEMS scanner for a laser printer of claim 1;

further comprising;

a mirror formed on a surface of the silicon scan plate.

30. The MEMS scanner for a laser printer of claim 29;

wherein the mirror has a reflectivity greater than about 90% at a wavelength of about 650 nanometers.

31. The MEMS scanner for a laser printer of claim 30;

wherein the mirror has a reflectivity greater than about 95% at a wavelength of about 650 nanometers.

32. The MEMS scanner for a laser printer of claim 1;

further comprising first and second heater leads functionally coupled to the respective first and second opposed mounting structures.

33. The MEMS scanner for a laser printer of claim 32;

wherein the first and second heater leads are operable to create an electric potential across the first and second torsion arms.

34. The MEMS scanner for a laser printer of claim 33;

wherein the first and second heater leads are operable to induce joule heating within the first and second torsion arms.

35. An electrophotographic printer;

comprising;

a photoconductor operable to, in succession, receive a static charge, receive modulated light to form a latent electrostatic image, receive toner in a pattern corresponding to the latent electrostatic image, and transfer the toner to a receiving web; and

an exposure unit operable to provide modulated light to the photoconductor, the exposure unit comprising;

a light source responsive to a modulated signal;

beam shaping optics aligned to receive light from the light source and produce a shaped beam of light; and

a MEMS scanner aligned to receive the shaped beam of light and operable to periodically scan the light across the photoconductor;

wherein the MEMS scanner comprises;

a silicon scan plate having a lateral dimension greater than about 4 times its longitudinal dimension;

first and second opposed torsion arms, each torsion arm coupled to the scan plate and extending longitudinally from a proximal to a distal point, the first and second torsion arms defining an axis of rotation of the scan plate;

first and second opposed mounting structures, each mounting structure coupled to a distal point of a respective torsion arm; and

first and second suspensions interposed between the scan plate and respective first and second torsion arms, the first and second suspensions forming a torque spreading apparatus operative to maintain dynamic flatness of the mirror during operation of the MEMS scanner, wherein the first and second suspensions include respective first and second suspension beams and the first and second suspension beams are coupled to the silicon scan plate by respective center connectors and first and second lateral connectors.

36. The electrophotographic printer of claim 35;

wherein the MEMS scanner has scan mirror having a length of about 8 millimeters in the first axis and a length of about 750 microns in the second axis.