System and method for providing residual stress test structures

• US 7,636,151 B2
• Filed: 06/15/2006
• Issued: 12/22/2009
• Est. Priority Date: 01/06/2006
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Chui, Clarence, Kogut, Lior, Kothari, Manish
• Primary Examiner(s): Connolly; Patrick J
• Application Number:
  US11/453,633
• Publication Number:
  US 20070177129A1
• Time in Patent Office: 1,286 Days
• Field of Search: 356/480, 356/519, 356/511, 356/512, 356/35.5
• US Class Current: 356/35.5
• CPC Class Codes: G01L 5/0047 measuring forces due to residual stresses
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

The invention comprises systems and methods determining residual stress such as that found in interferometric modulators. In one example, a test unit can be configured to indicate residual stress in a film by interferometrically modulating light indicative of an average residual stress in two orthogonal directions of the substrate. The test unit can include a reflective membrane attached to the substrate where membrane is configured as a parallelogram with at least a portion of each side attached to the substrate, and an interferometric cavity formed between a portion of the membrane and a portion of the substrate, and where the membrane is configured to deform based on the residual stress of in the film and modulate light indicative of the amount of membrane deformation.

Claims

1. A test unit configured to indicate residual stress in a deposited film, wherein the test unit is configured to interferometrically modulate light indicative of average residual stress in two orthogonal directions of the film.

2. The test unit of claim 1, wherein the test unit comprises:

a reflective deformable membrane attached to the substrate, the membrane configured as a parallelogram with at least a portion of each side attached to the substrate, and wherein the membrane comprises a portion of the deposited film; and

an interferometric cavity formed between a portion of the membrane and a portion of the substrate,

wherein the membrane is configured to deform based on the residual stress of the film and modulate light indicative of the amount of membrane deformation.

3. The test unit of claim 2, wherein the membrane comprises silicon, aluminum, nickel, germanium, gold, chromium, silver, or alloys thereof.

4. The test unit of claim 2, wherein the membrane is configured such that light modulated by the membrane includes color information that indicates the residual stress of the films.

5. The test unit of claim 2, wherein the membrane comprises an etch hole.

6. A system configured to determine residual stress of a deposited film, comprising:

one or more test units, each test unit comprising a reflective membrane that comprises a portion of the deposited film, wherein the membrane is configured as a parallelogram with at least a portion of each side attached to a substrate, wherein the membrane is configured to deform based on the residual stress of the film and modulate light indicative of the amount of membrane deformation;

an imaging system positionable to receive modulated light reflecting from the one or more test units and configured to produce image data associated with the received light; and

a computer in communication with the imaging system, the computer configured to process the image data and generate information relating to the residual stress in the film.

7. The system of claim 6, wherein the computer is configured to calculate deformation information of the membrane based on the image data, and further configured to determine the information relating to the residual stress based on the deformation information.

8. The system of claim 6, wherein the test unit is configured such that the modulated light received by the imaging system includes color information that indicates the deformation of the membrane.

9. The system of claim 6, wherein the each of the one or more test units comprise an interferometric cavity formed between a portion of the membrane and a portion of the substrate, wherein the membrane is configured to deform based on the residual stress of the film and modulate light based on the amount of deformation.

10. The system of claim 6, wherein the imaging system comprises an optical system and a high resolution imaging device.

11. The system of claim 6, wherein at least one of the test devices are configured to be placed in a relaxed state or an actuated state.

12. The system of claim 6, wherein the one or more test units further comprises an interferometric cavity between the membrane and the substrate.

13. The system of claim 6, wherein the one or more test units are configured to indicate average residual stress in two orthogonal directions.

14. A method of measuring residual stress of a deposited film, the method comprising interferometrically modulating light using a membrane that deforms based on residual stress of the film such that the modulated light indicates the residual stress in the film in two orthogonal directions.

15. The method of claim 14, further comprising determining the residual stress of the film based on the modulated light.

16. The method of claim 15, further comprising receiving the modulated light in an imaging system, generating image data associated with the modulated light, and determining the residual stress of the film using the image data.

17. The method of claim 16, further comprising providing the image data to a computer for use in determining the residual stress.

18. The method of claim 17, wherein determining the residual stress comprises:

determining deformation information of the membrane based on the image data; and

generating residual stress information based on the deformation information.

19. The method of claim 18, wherein determining deformation information comprises analyzing color information in the image data, the color information being indicative of the deformation of the membrane.

20. A test unit for measuring residual stress in a deposited film, comprising means for reflecting a first portion of light, and means for reflecting a second portion of light that interferes with the first portion of light to modulate light indicative of average residual stress in two orthogonal directions of the film.

21. The test unit of claim 20, further comprising means for determining the residual stress of the film based on the modulated light.

22. The test unit of claim 21, wherein the determining means comprises means for receiving the modulated light, means for generating image data from the received modulated light, and means for determining residual stress information based on the image data.

23. The test unit of claim 20, wherein the first portion of light reflecting means comprises a partially-reflective surface of the substrate, and the second portion of light reflecting means comprises a reflective membrane attached to the substrate, the membrane configured as a parallelogram with at least a portion of each side connected to the substrate, the membrane further configured to deform based on the residual stress of the film, wherein the modulated light is indicative of the amount of membrane deformation.

24. The device of claim 22, wherein the light receiving means comprises an optical system.

25. The device of claim 22, wherein the image data generating means comprises a high resolution imaging device.

26. The device of claim 22, wherein the residual stress determining means comprises a computer in communication with the image data generating means, the computer configured to process the image data and generate residual stress information of the film.

27. A method of manufacturing a device to indicate the residual stress in a deposited film, the method comprising disposing a thin reflective membrane on a substrate such that an interferometric cavity is formed between a portion of the membrane and a portion of the substrate, wherein the membrane comprises a portion of the deposited film, and wherein the membrane is configured in the shape of a parallelogram with at least a portion of each side attached to the substrate, and the membrane is further configured to deform based on the residual stress of the film in two orthogonal directions and modulate light indicative of the amount of deformation.

28. A display device, comprising:

a substrate;

one or more one bi-stable display elements disposed on the substrate wherein each the one or more bi-stable display elements comprise a moveable membrane which comprises a portion of a film; and

one or more test units, each test unit comprising a membrane defining a portion of an interferometric cavity, wherein the membrane comprises a portion of the film having at least three perimeter edges, at least a portion of each of the three perimeter edges being attached to the substrate, wherein the one or more test units are configured to modulate light such that the modulated light is indicative of the residual stress of the film.

29. The display device of claim 28, wherein the one or more test units are configured to modulate light such that the modulated light is indicative of the residual stress of the film in one direction.

30. The display device of claim 28, wherein the one or more test units are configured to modulate light such that the modulated light is indicative of the average residual stress of the film in two orthogonal directions.

31. The display device of claim 28, wherein four test units are disposed on the substrate near the display in a configuration that surrounds the display.

32. The display device of claim 28, wherein one or more test units are disposed throughout the display.

33. The display device of claim 28, wherein at least a portion of the display is configured as a parallelogram having four corners, and a test unit is disposed near each of the four corners of the display to indicate residual stress of the film across the display.

34. The display device of claim 33, wherein the test units are configured to modulate light such that the modulated light is indicative of the residual stress of the film in two orthogonal directions.

35. The display device of claim 28, wherein the perimeter of the membrane is configured as a parallelogram, and at least a portion of each side of the membrane is connected to the substrate to form the interferometric cavity between the membrane and the substrate.

36. The display device of claim 28, wherein the membrane is configured such that the perimeter of the membrane is connected to the substrate to form the interferometric cavity between the membrane and the substrate.

37. A method of determining residual stress of a film layer incorporated in a display, comprising:

interferometrically modulating light, wherein the modulated light is indicative of the residual stress in the film layer in two orthogonal directions;

detecting the modulated light;

generating image data associated with the detected modulated light; and

determining residual stress of the film layer of the display based on the image data.

38. The method of claim 37, wherein interferometrically modulating light comprises deforming a membrane of a test unit based on the residual stress of the film layer, the deformity of the membrane affecting the light modulation.

39. The method of claim 38, wherein the image data comprises color information, and wherein determining the residual stress comprises associating the color information in the image data with predetermined deformation characteristics of the test unit to determine residual stress of the film layer of the display.