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Display methods and apparatus

  • US 7,636,189 B2
  • Filed: 10/01/2007
  • Issued: 12/22/2009
  • Est. Priority Date: 02/23/2005
  • Status: Active Grant
First Claim
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1. A spatial light modulator comprising:

  • a substrate defining a plane; and

    a shutter suspended over the substrate by a compliant beam, whereina cross-sectional width of the compliant beam in a dimension parallel to the plane of the substrate is between about 0.2 μ

    m and about 10 μ

    m, anda width of the compliant beam in a dimension perpendicular to the plane of the substrate is at least about 1.4 times the cross-sectional width of the compliant beam in the dimension parallel to the plane of the substrate.

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