Apparatus for SLM-based optical lithography with gray level capability

• US 7,639,416 B2
• Filed: 10/24/2007
• Issued: 12/29/2009
• Est. Priority Date: 08/24/2002
• Status: Active Grant

• Current Assignee: Chime Ball Technology Co., Ltd.
• Original Assignee: Maskless Lithography, Inc.
• Inventors: Meisburger, William Daniel
• Primary Examiner(s): Mack; Ricky L
• Assistant Examiner(s): Thomas; Brandi N
• Application Number:
  US11/923,399
• Publication Number:
  US 20090086182A1
• Time in Patent Office: 797 Days
• Field of Search: 359/290, 359/291, 359/298, 355/35, 355/67
• US Class Current: 359/290
• CPC Class Codes: G03F 7/70216 Mask projection systems
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/70283 Mask effects on the imaging process
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70383 Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams maskless lithography using a programmable mask G03F7/70291
• CPC Class Codes: G03F 7/70466 Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature stitching G03F7/70475
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
• CPC Class Codes: G03F 7/70558 Dose control, i.e. achievement of a desired dose

Abstract

An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.

Claims

1. A lithographic tool, comprising:

a spatial light modulator, said spatial light modulator comprising an area array of individually switchable elements, said elements of said spatial light modulator being arranged in rows and columns on a rectangular grid;

a light source configured to continuously illuminate said spatial light modulator;

imaging optics configured to continuously project an image of said spatial light modulator on a photosensitive material, said photosensitive material comprising an area array of pixels, the size and configuration of said pixels corresponding to the projected spacing and configuration of individually switchable elements in said spatial light modulator, wherein said photosensitive material coats the surface of a substrate;

a control system configured to control switching of said individually switchable elements of said spatial light modulator for defining features in said photosensitive material, said switching being between at least two states, wherein a first state allows light to reach said photosensitive material and a second state stops light from reaching said photosensitive material; and

a stage configured to move said substrate relative to said projected image, whereby a pixel in said photosensitive material receives, in serial, doses of energy from multiple elements of said spatial light modulator;

wherein the direction of movement of said substrate is neither parallel nor orthogonal to said columns of said elements of said spatial light modulator and wherein said control system is further configured to control switching of said elements of said spatial light modulator to vary the number of elements of said spatial light modulator that serially contribute to a total dose of energy received by any pixel in said photosensitive material, whereby some pixels in said photosensitive material receive different, non-zero, total doses of energy.

2. A lithographic tool as in claim 1, wherein said direction of movement of said substrate is at 45 degrees to said columns of said elements of said spatial light modulator.

3. A lithographic tool as in claim 1, wherein feature edges in said photosensitive material are shifted by a sub-pixel distance from the pixel edges defined by said area array in said photosensitive material.

4. A lithographic tool as in claim 1, wherein said light source is a lamp system comprising an arc lamp.

5. A lithographic tool as in claim 4, wherein said lamp system further comprises a light pipe positioned between said arc lamp and said spatial light modulator.

6. A lithographic tool as in claim 4, wherein said lamp system further comprises a fly'"'"'s eye lens array positioned between said arc lamp and said spatial light modulator.

7. A lithographic tool as in claim 1, wherein said light source is a quasi-continuous laser.

8. A lithographic tool as in claim 1, wherein said spatial light modulator is a digital micro-mirror device.

9. A lithographic tool as in claim 1, wherein said correspondence of said pixels to said individually switchable elements in said spatial light modulator is one-to-one.

10. A lithographic tool as in claim 1, further comprising:

a data preparation computer; and

decompression electronics;

wherein said data preparation computer is configured to modify a design data file into a form suitable for said decompression electronics and said decompression electronics is configured to translate said modified design data into a matrix of values representing said states for each of said elements of said spatial light modulator.

11. A lithographic tool as in claim 1, further comprising a substrate alignment system, said substrate alignment system being configured to align said substrate to said imaging optics.

12. A lithographic tool as in claim 11, wherein said substrate alignment system is a machine vision system, said machine vision system being configured to compare arbitrary features on said substrate to images previously stored in a memory device.

13. A lithographic tool as in claim 11, wherein said substrate alignment system is a machine vision system, said machine vision system being configured to compare arbitrary features on said substrate to idealized images previously stored in a memory device.

14. A lithographic tool as in claim 13, wherein said idealized images are selected from the group consisting of a cross and a circle.

15. A lithographic tool as in claim 11, wherein said substrate alignment system is further configured to measure the distortion of said substrate.

16. A lithographic tool as in claim 15, further comprising:

a data preparation computer; and

decompression electronics;

wherein said data preparation computer is configured to (1) modify a design data file into a form suitable for said decompression electronics and (2) modify said design data to compensate for said distortion of said substrate, and wherein said decompression electronics is configured to translate said modified design data into a matrix of values representing said states for each of said elements of said spatial light modulator.

17. A lithographic tool, comprising:

a spatial light modulator, said spatial light modulator comprising an area array of individually switchable elements;

a light source configured to continuously illuminate said spatial light modulator;

imaging optics configured to project an image of said spatial light modulator on a photosensitive material, said photosensitive material comprising an area array of pixels, the size and configuration of said pixels corresponding to the projected spacing and configuration of individually switchable elements in said spatial light modulator;

a control system configured to control switching of said individually switchable elements of said spatial light modulator for defining features in said photosensitive material, said switching being between at least two states, wherein a first state allows light to reach said photosensitive material and a second state stops light from reaching said photosensitive material; and

a stage configured to move said substrate relative to said projected image, whereby a pixel in said photosensitive material receives, in serial, doses of energy from multiple elements of said spatial light modulator;

wherein said stage and said imaging optics are further configured to provide a defocused image of said spatial light modulator on said photosensitive material, and wherein said control system is further configured to control switching of said elements of said spatial light modulator to vary the number of elements of said spatial light modulator that serially contribute to the total dose of energy received by any pixel in said photosensitive material, whereby some pixels in said photosensitive material receive different, non-zero, total doses of energy.

18. A lithographic tool as in claim 17, further comprising a gap measuring system configured to monitor the distance between said imaging optics and said photosensitive material coating said substrate.

19. A lithographic tool as in claim 18, further comprising a gap control system for keeping the distance between said photosensitive material and said imaging optics constant, whereby a desired defocus is maintained.

20. A lithographic tool, comprising:

a spatial light modulator, said spatial light modulator comprising an area array of individually switchable elements;

a light source configured to continuously illuminate said spatial light modulator;

imaging optics configured to project an image of said spatial light modulator on a photosensitive material, said photosensitive material comprising an area array of pixels, the size and configuration of said pixels corresponding to the projected spacing and configuration of individually switchable elements in said spatial light modulator, wherein said photosensitive material coats the surface of a substrate;

a control system configured to control switching of said individually switchable elements of said spatial light modulator for defining features in said photosensitive material, said switching being between at least two states, wherein a first state allows light to reach said photosensitive material and a second state stops light from reaching said photosensitive material; and

a stage configured to move said substrate relative to said projected image, whereby a pixel in said photosensitive material receives, in serial, doses of energy from multiple elements of said spatial light modulator;

wherein said imaging optics is further configured to project a blurred image of said spatial light modulator on said photosensitive material, and wherein said control system is further configured to control switching of said elements of said spatial light modulator to vary the number of elements of said spatial light modulator that serially contribute to the total dose of energy received by any pixel in said photosensitive coating, whereby some pixels in said photosensitive material receive different, non-zero, total doses of energy.

21. A lithographic tool as in claim 20, wherein said imaging optics comprises a diffuser configured to blur said image of said spatial light modulator.

22. A lithographic tool as in claim 20, wherein said imaging optics has a numerical aperture adjusted such that said image of said spatial light modulator is blurred.

23. A lithographic tool as in claim 20, wherein said imaging optics comprises a microlens array configured to blur said image of said spatial light modulator.

24. A lithographic tool as in claim 20, wherein said elements of said spatial light modulator are arranged in rows and columns on a rectangular grid and wherein the direction of movement of said substrate is parallel to said columns of said elements of said spatial light modulator.