Combine-information processing apparatus, method for processing combine-information, program, and recording medium

• US 7,640,126 B2
• Filed: 04/23/2008
• Issued: 12/29/2009
• Est. Priority Date: 04/27/2007
• Status: Active Grant

• Current Assignee: Omron Corporation
• Original Assignee: Omron Corporation
• Inventors: Fujii, Toru
• Primary Examiner(s): Nghiem; Michael P.
• Assistant Examiner(s): KHUU, HIEN DIEU THI
• Application Number:
  US12/108,153
• Publication Number:
  US 20080270058A1
• Time in Patent Office: 615 Days
• Field of Search: 702/19, 702/23, 702 33- 35, 702 81- 85, 702/97, 702/108, 702/118, 702182-185, 702/194, 702/199, 700108-111, 700/121, 700/29, 700/291, 700/36, 700/51, 700/83, 700/99, 708/100, 708/422
• US Class Current: 702/83
• CPC Class Codes: G05B 2219/31477 Display correlated data so as to represent the degree of correlation
• CPC Class Codes: G05B 2219/32221 Correlation between defect and measured parameters to find origin of defect
• CPC Class Codes: G05B 23/024 Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

An inspectional equation storage unit 103 for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit 104 for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit 105 for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit 106 for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit 107 for outputting the inspecting results.

Claims

1. A combine-information processing apparatus comprising:

an inspectional equation storage unit in which an inspectional equation for calculating one or more principal component scores can be stored, said inspectional equation being obtained by performing a principal component analysis on normal measured data that is measured data regarding a plurality of measuring objects in terms of two or more correlated measurement items, and said plurality of measuring objects being processed by a manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state;

an inspected measured-data acceptance unit for accepting inspected measured data that is measured data regarding the measuring objects processed by said manufacturing apparatus in terms of the measurement items corresponding to each term contained in said inspectional equation;

a principal-component-score calculation unit for calculating the principal component scores using the inspected measured data, accepted by said inspected measured-data acceptance unit, with said inspectional equation;

an inspecting unit for inspecting the state of said manufacturing apparatus using the principal component scores calculated by said principal-component-score calculation unit; and

an output unit for outputting inspecting results obtained by said inspecting unit.

2. The combine-information processing apparatus according to claim 1, wherein

said inspecting unit determines that said manufacturing apparatus is abnormal when the principal component scores calculated by said principal-component-score calculation unit are greater than a predetermined threshold, and

said output unit outputs inspecting results indicating the manufacturing apparatus'"'"' abnormality determined by said inspecting unit.

3. The combine-information processing apparatus according to claim 1, wherein

said inspected measured-data acceptance unit accepts a plurality of inspected measured data blocks obtained by measuring a plurality of measuring objects,

said principal-component-score calculation unit calculates a plurality of principal component scores associated with said plurality of inspected measured data blocks using said plurality of inspected measured data blocks accepted by said inspected measured-data acceptance unit with said inspectional equation,

said inspecting unit determines that said manufacturing apparatus is abnormal when a representative value of the plurality of principal component scores calculated by said principal-component-score calculation unit is greater than a predetermined threshold, and

said output unit outputs inspecting results indicating the manufacturing apparatus'"'"' abnormality determined by said inspecting unit.

4. The combine-information processing apparatus according to claim 1, wherein

said inspected measured-data acceptance unit accepts a plurality of inspected measured data blocks obtained by measuring a plurality of measuring objects,

said principal-component-score calculation unit calculates a plurality of principal component scores associated with said plurality of inspected measured data blocks using said plurality of inspected measured data blocks accepted by said inspected measured-data acceptance unit with said inspectional equation,

said inspecting unit determines that said manufacturing apparatus is abnormal when a value of dispersion of the plurality of principal component scores calculated by said principal-component-score calculation unit is greater than a predetermined threshold, and

said output unit outputs inspecting results indicating the manufacturing apparatus'"'"' abnormality determined by said inspecting unit.

5. The combine-information processing apparatus according to claim 1 further comprising:

a normal measured-data acceptance unit for accepting normal measured data that is measured data regarding a plurality of measuring objects in terms of two or more correlated measurement items, and said plurality of measuring objects being processed by a manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state; and

an inspectional equation acquisition unit for acquiring said inspectional equation for calculating one or more principal component scores and storing said inspectional equation in said inspectional equation storage unit, and said inspectional equation being obtained by performing a principal component analysis on said normal measured data accepted by said normal measured-data acceptance unit.

6. The combine-information processing apparatus according to claim 1, wherein

among expressions that calculate the principal component scores and are obtained by performing a principal component analysis on said normal measured data, said inspectional equation that can be stored in said inspectional equation storage unit is an inspectional equation for calculating the principal component scores in the ascending order of contribution ratio.

7. The combine-information processing apparatus according to claim 1, wherein

among expressions that calculate the principal component scores and are obtained by performing a principal component analysis on said normal measured data, said inspectional equation that can be stored in said inspectional equation storage unit at least includes an expression for calculating the principal component scores of a principal component having the lowest contribution ratio.

8. The combine-information processing apparatus according to claim 1, wherein

when the magnitude of coefficients in each term contained in the expression for calculating the principal component scores obtained through said principal component analysis is smaller than a predetermined threshold, said inspectional equation that can be stored in said inspectional equation storage unit is an expression for calculating principal component scores with its coefficients set to 0.

9. A computer-implemented method for processing combine-information comprising:

an inspected measured-data acceptance step of accepting inspected measured data that is measured data regarding a plurality of measuring objects processed by a manufacturing apparatus in terms of measurement items corresponding to terms contained in an inspectional equation stored in an inspectional equation storage unit, said inspectional equation calculating one or more principal component scores and obtained by performing a principal component analysis on normal measured data, said normal measured data being measured data regarding a plurality of measuring objects, that are processed by said manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state, in terms of two or more correlated measurement items;

a principal-component-score calculation, by one or more computers, step of calculating the principal component scores using the inspected measured data accepted in said inspected measured-data acceptance step with said inspectional equation;

an inspecting step of inspecting the state of said manufacturing apparatus using the principal component scores calculated in said principal-component-score calculation step; and

an output step of outputting, by one or more computers, inspecting results obtained in said inspecting step.

10. The computer-readable method for processing combine-information according to claim 9, further comprising:

a normal measured-data acceptance step of accepting normal measured data that is measured data regarding a plurality of measuring objects in terms of two or more correlated measurement items, said plurality of measuring objects being processed by a manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state; and

an inspectional equation acquisition step of acquiring said inspectional equation for calculating the one or more principal component scores and storing said inspectional equation in said inspectional equation storage unit, said inspectional equation being obtained by performing a principal component analysis on said normal measured data accepted in said normal measured-data acceptance step.

11. A computer-readable medium in which a program executable by a computer is recorded to perform:

an inspected measured-data acceptance step of accepting inspected measured data that is measured data regarding a plurality of measuring objects processed by a manufacturing apparatus in terms of measurement items corresponding to terms contained in an inspectional equation stored in an inspectional equation storage unit, said inspectional equation calculating one or more principal component scores and obtained by performing a principal component analysis on normal measured data, said normal measured data being measured data regarding a plurality of measuring objects, that are processed by said manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state, in terms of two or more correlated measurement items;

a principal-component-score calculation step of calculating the principal component scores using the inspected measured data accepted in said inspected measured-data acceptance step with said inspectional equation;

an inspecting step of inspecting the state of said manufacturing apparatus using the principal component scores calculated in said principal-component-score calculation step; and

an output step of outputting inspecting results obtained in said inspecting step.

12. The computer-readable medium, according to claim 11, in which a program executable by a computer is recorded to perform:

a normal measured-data acceptance step of accepting normal measured data that is measured data regarding a plurality of measuring objects in terms of two or more correlated measurement items, said plurality of measuring objects being processed by a manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state; and

an inspectional equation acquisition step of acquiring said inspectional equation for calculating the one or more principal component scores and storing said inspectional equation in said inspectional equation storage unit, said inspectional equation being obtained by performing a principal component analysis on said normal measured data accepted in said normal measured-data acceptance step.