Proof-mass with supporting structure on integrated circuit-MEMS platform
First Claim
1. A micro-electromechanical-system (MEMS) device, comprising:
- a substrate;
at least one semiconductor layer provided on the substrate;
a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer;
a support structure attached to the substrate;
at least one elastic device attached to the support structure;
a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions;
at least one top electrode provided on the at least one elastic device; and
at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes;
wherein;
the initial capacitance between the at least one top electrode and the at least one bottom electrode changes in response to a force applied to the proof-mass;
the change in initial capacitance results from a change in the area of overlap between the at least one top electrode and the at least one bottom electrode; and
the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.
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Accused Products
Abstract
Provided is a micro-electromechanical-system (MEMS) device including a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes, wherein the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.
37 Citations
22 Claims
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1. A micro-electromechanical-system (MEMS) device, comprising:
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a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes; wherein; the initial capacitance between the at least one top electrode and the at least one bottom electrode changes in response to a force applied to the proof-mass; the change in initial capacitance results from a change in the area of overlap between the at least one top electrode and the at least one bottom electrode; and the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A micro-electromechanical-system (MEMS) device, comprising:
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a substrate; a circuit region including at least one chip containing drive/sense circuitry; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes; wherein; the initial capacitance between the at least one top electrode and the at least one bottom electrode changes in response to a force applied to the proof-mass; the change in initial capacitance results from a change in the area of overlap between the at least one top electrode and the at least one bottom electrode; and the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated one of directly and indirectly on the substrate.
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Specification