Rotational MEMS device having piezo-resistor sensor
First Claim
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1. A rotational micro-electromechanical system (MEMS) device comprising:
- a pair of torsion springs which support a stage;
four resistors, at least one of the resistors being formed along a center axis of at least one of the torsion springs; and
a plurality of electrical signal cables connected to the four resistors,wherein the at least one of the torsion springs is formed in a <
100>
direction on an n-type silicon substrate having a (100) plane, and the at least one of the resistors formed on the at least one of the torsion springs are formed in a <
100>
group direction,wherein the four resistors are separated from each other, andwherein each of the plurality of electrical signal cables is separately connected to one end of the four resistors.
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Abstract
A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a <100> direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a <110> group direction.
16 Citations
12 Claims
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1. A rotational micro-electromechanical system (MEMS) device comprising:
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a pair of torsion springs which support a stage; four resistors, at least one of the resistors being formed along a center axis of at least one of the torsion springs; and a plurality of electrical signal cables connected to the four resistors, wherein the at least one of the torsion springs is formed in a <
100>
direction on an n-type silicon substrate having a (100) plane, and the at least one of the resistors formed on the at least one of the torsion springs are formed in a <
100>
group direction,wherein the four resistors are separated from each other, and wherein each of the plurality of electrical signal cables is separately connected to one end of the four resistors. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A rotational micro-electromechanical system (MEMS) device comprising:
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a pair of torsion springs which support a stage; a cross shaped resistor defining four ends and being formed along a center axis of at least one of the torsion springs; and a plurality of electrical signal cables, wherein separate electrical signal cables are each respectively connected to each the four ends of the resistor, wherein the torsion springs are formed on an n-type silicon substrate having a (100) plane, and at least two ends of the resistor which are opposite to each other are formed in a <
100>
direction, and two other ends of the resistor which are opposite to each other are formed perpendicularly to the <
100>
direction. - View Dependent Claims (9, 10, 11, 12)
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Specification