MEMS packaging with improved reaction to temperature changes

• US 7,642,628 B2
• Filed: 01/11/2005
• Issued: 01/05/2010
• Est. Priority Date: 01/11/2005
• Status: Expired due to Fees

• Current Assignee: Rosemount Incorporated (Emerson Electric Company)
• Original Assignee: Rosemount Incorporated (Emerson Electric Company)
• Inventors: Anderson, William T., Strei, David
• Primary Examiner(s): Le; Thao X
• Assistant Examiner(s): ARORA, AJAY
• Application Number:
  US11/033,076
• Publication Number:
  US 20060151864A1
• Time in Patent Office: 1,820 Days
• Field of Search: 257/432, 257/704, 257/678, 257/786, 257/E33.058, 385/18, 385/140
• US Class Current: 257/678
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 7/0077 Other packages not provided for in groups B81B7/0035 - B81B7/0074

Abstract

A large-scale MEMS device includes a MEMS die supported by at least one compliant die mount. The compliant die mount couples the MEMS die to a support structure. The support structure is positioned within a package. In accordance with an aspect of the invention, the package is substantially symmetrical about the MEMS die. In accordance with another aspect of the invention, the support structure and/or the package is designed to have a neutral bend axis along the MEMS die.

Claims

1. A MEMS device comprising:

a MEMS die having a rectangular shape with at least one dimension being greater than or equal to about 1.0 mm, wherein the MEMS die has a rectangular periphery;

a support structure having a top surface, a bottom surface, and a cavity formed between the top and bottom surfaces, the cavity defining a rectangular inner surface of the support structure that is at least substantially perpendicular to the top and bottom surfaces, wherein the rectangular inner surface of the support structure extends beyond the rectangular periphery of the MEMS die such tat the MEMS die is disposed on the rectangular inner surface of the support structure;

a gap that extends outward from the rectangular periphery of the MEMS die to the rectangular inner surface of the support structure;

at least one compliant mount coupled to an edge of the MEMS die and filling the entire gap, wherein the mount couples the MEMS die to the support structure; and

a pair of covers disposed on opposite sides of the support structure.

2. The device of claim 1, wherein the pair of covers are substantially identical to each other.

3. The device of claim 1, wherein the support structure is a printed circuit board.

4. The device of claim 3, wherein the printed circuit board includes electronic circuitry.

5. The device of claim 4, wherein the electronic circuitry is positioned to reduce bending of the support structure in response to a change in temperature.

6. The device of claim 1, wherein the at least one compliant mount has a thickness that is substantially equal to a thickness of the support structure.

7. The device of claim 1, wherein at least one of the covers includes a recess.

8. The device of claim 1, wherein the MIEMS die has at least one dimension that is about 3.0 mm.

9. The device of claim 1, wherein the support structure is formed of an epoxy laminate.

10. The device of claim 9, wherein the epoxy laminate is FR4.

11. The device of claim 9, wherein the epoxy laminate is ER5.

12. The device of claim 1, and further comprising a second support structure defining a second cavity, the second cavity having a second MEMS die therein, the second MEMS die being coupled to the second support structure by at least one compliant mount.

13. The device of claim 12, wherein the first and second support structures are stacked with respect to one another.

14. The device of claim 1, wherein the device is an electronically controlled variable optical attenuator.

15. The device of claim 1, and further comprising at least one fiber-optic cable coupled to the MEMS die.

16. The device of claim 1, wherein the support structure has a plurality of bonding pads that are coupled to a plurality of bonding pads on the MEMS die.