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Stacked MEMS device

  • US 7,642,657 B2
  • Filed: 12/19/2007
  • Issued: 01/05/2010
  • Est. Priority Date: 12/21/2006
  • Status: Active Grant
First Claim
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1. A MEMS apparatus comprising:

  • a base having electrical interconnects;

    a MEMS device having a cap side, a substrate side and a movable member, the movable member attached at and electrically connected through the substrate side and enclosed within a chamber between the substrate side and the cap side, the cap side being secured to the base; and

    a circuit chip at the substrate side of the MEMS device for electrically controlling the movable member, the movable member being between the base and the circuit chip.

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