PZT MEMS resonant Lorentz force magnetometer
First Claim
1. A configurable microelectromechanical system (MEMS) magnetometer comprising a deflectable resonator comprising:
- a base layer;
a Lorentz force (LF) drive conductor attached to said base layer; and
a piezoelectric sensor attached to said base layer and electrically isolated from said LF drive conductor wherein said MEMS system is capable of processing maximum drive current equivalent to the maximum current of the Lorentz force drive conductor.
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Accused Products
Abstract
A MEMS magnetometer comprises a deflectable resonator comprising a base layer; a Lorentz force (LF) drive conductor attached to the base layer; and a piezoelectric sensor attached to the base layer and electrically isolated from the LF drive conductor. The LF drive conductor comprises conductive material configured for receiving a current at a mechanical resonant frequency of the device capable of causing mechanical deformation of the deflectable resonator, wherein the current causes formation of Lorentz forces in a presence of a magnetic field, and wherein the deflectable resonator is mechanically deformed as a result of the formation of the Lorentz forces. The mechanical deformation of the deflectable resonator generates a detectable piezoelectric electrical signal that is proportional to the magnitude of the magnetic field.
42 Citations
16 Claims
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1. A configurable microelectromechanical system (MEMS) magnetometer comprising a deflectable resonator comprising:
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a base layer; a Lorentz force (LF) drive conductor attached to said base layer; and a piezoelectric sensor attached to said base layer and electrically isolated from said LF drive conductor wherein said MEMS system is capable of processing maximum drive current equivalent to the maximum current of the Lorentz force drive conductor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for detecting a magnetic field using a magnetometer comprising a deflectable resonator comprising a base layer;
- a Lorentz force (LF) drive conductor attached to said base layer; and
a piezoelectric sensor attached to said base layer and electrically isolated from said LF drive conductor, said method comprising;placing said magnetometer in a magnetic field; applying an AC current corresponding to a mechanical resonant frequency of the resonator to said LF drive conductor; and detecting a mechanical deformation of said deflectable resonator with a piezoelectrically generated signal, wherein an amount of deformation of said deflectable resonator is proportional to a piezoelectric signal generated by said piezoelectric sensor, and wherein said piezoelectric signal is proportional to a magnitude of said magnetic field. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
- a Lorentz force (LF) drive conductor attached to said base layer; and
Specification