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Impedance matching apparatus

  • US 7,642,879 B2
  • Filed: 12/19/2007
  • Issued: 01/05/2010
  • Est. Priority Date: 11/09/2004
  • Status: Active Grant
First Claim
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1. An impedance matching apparatus to be interposed between a high-frequency power source and a load, for changing impedances of impedance variable devices so as to match an impedance of the high-frequency power source and an impedance of the load, comprising:

  • a high-frequency wave information detector to detect information on a forward wave advancing from the high-frequency power source toward the load and information on a reflected wave advancing from the load toward the high-frequency power source, at an input terminal of the impedance matching apparatus;

    a variable device information detector to detect information on variable values of the impedance variable device;

    a storage unit to store therein characteristic parameters of the impedance matching apparatus acquired through a preceding measurement, with respect to the information on the variable values of the impedance variable devices, in correlation with the information on the variable values of the impedance variable devices;

    a calculator to calculate the information on the forward wave and the information on the reflected wave at an output terminal of the impedance matching apparatus, based on the information on the variable values of the impedance variable devices detected by the variable device information detector, on the characteristic parameters stored in the storage unit, and on the information on the forward wave and the information on the reflected wave detected by the high-frequency wave information detector;

    an identifier to identify the information on the variable values of the impedance variable devices needed for realizing a desired target input reflection coefficient, based on the information on the forward wave and the information on the reflected wave at the output terminal of the impedance matching apparatus calculated by the calculator, on the desired target input reflection coefficient, and on the characteristic parameters stored in the storage unit; and

    an adjustment unit to adjust the impedances of the impedance variable devices, based on the information on the variable values of the impedance variable devices identified by the identifier.

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