Microelectromechanical system having a dielectric movable membrane and a mirror

• US 7,643,202 B2
• Filed: 05/09/2007
• Issued: 01/05/2010
• Est. Priority Date: 05/09/2007
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Sasagawa, Teruo
• Primary Examiner(s): Choi; William C
• Application Number:
  US11/746,443
• Publication Number:
  US 20080278787A1
• Time in Patent Office: 972 Days
• Field of Search: 359/247, 359/290, 359/295, 359/302
• US Class Current: 359/290
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable functional element. The movable functional element includes a flexible dielectric layer and a reflective element. The flexible dielectric layer flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer. The reflective element has a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween.

Claims

1. A microelectromechanical (MEMS) device comprising:

at least one electrode;

a first reflective layer; and

a movable functional element comprising;

a flexible dielectric layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer; and

a reflective element having a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween.

2. The MEMS device of claim 1, wherein the flexible dielectric layer comprises SiO₂.

3. The MEMS device of claim 1, wherein the reflective element comprises aluminum.

4. The MEMS device of claim 1, wherein the reflective element comprises:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a second dielectric layer between the second reflective layer and the electrically conductive layer.

5. The MEMS device of claim 4, wherein the communication path is disposed over an edge of the reflective element.

6. The MEMS device of claim 4, wherein the second dielectric layer includes a notch in an edge of the second dielectric layer, at least a portion of the communication path being within the notch.

7. The MEMS device of claim 4, wherein the second dielectric layer includes a first notch in a first edge of the second dielectric layer and a second notch in a second edge of the second dielectric layer, at least a portion of the communication path being within the first and second notches.

8. The MEMS device of claim 4, wherein the second dielectric layer includes at least one edge and a plurality of notches in the at least one edge, at least a portion of the communication path being within the plurality of notches.

9. The MEMS device of claim 4, wherein the communication path extends through the reflective element.

10. The MEMS device of claim 1, further comprising an electrically conductive layer over a side of the flexible dielectric layer opposite the reflective element, the conductive layer in electrical communication with the reflective element.

11. The MEMS device of claim 1, further comprising:

a display;

a processor that is configured to communicate with said display, said processor being configured to process image data; and

a memory device that is configured to communicate with said processor.

12. The MEMS device of claim 11, further comprising a driver circuit configured to send at least one signal to the display.

13. The MEMS device of claim 12, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

14. The MEMS device of claim 11, further comprising an image source module configured to send said image data to said processor.

15. The MEMS device of claim 14, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

16. The MEMS device of claim 11, further comprising an input device configured to receive input data and to communicate said input data to said processor.

17. A microelectromechanical (MEMS) device comprising:

first means for reflecting;

means for moving a portion of the device, the moving means comprising;

second means for reflecting; and

means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween, the supporting means having a flexible dielectric portion; and

means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means.

18. The MEMS device of claim 17, wherein the first reflecting means comprises a first reflective layer.

19. The MEMS device of claim 17, wherein the moving means comprises a movable functional element.

20. The MEMS device of claim 17, wherein the second reflecting means comprises a second reflective layer.

21. The MEMS device of claim 17, wherein the supporting means comprises a flexible dielectric layer.

22. The MEMS device of claim 17, wherein the actuating means comprises at least one electrode.

23. A microelectromechanical (MEMS) device comprising:

at least one electrode;

a first reflective layer; and

a movable functional element comprising;

a flexible layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer; and

a reflective element having a first portion mechanically coupled to the flexible layer and a second portion spaced from the flexible layer and defining a gap therebetween, the reflective element comprising;

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer, wherein the dielectric layer comprises SiO₂.

24. The MEMS device of claim 23, wherein the second reflective layer comprises aluminum.

25. The MEMS device of claim 23, wherein the electrically conductive layer comprises aluminum.

26. The MEMS device of claim 23, wherein the flexible layer comprises a flexible dielectric layer.

27. A microelectromechanical (MEMS) device comprising:

at least one electrode;

a first reflective layer; and

a movable functional element comprising;

a flexible layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer, wherein the flexible layer comprises nickel; and

a reflective element having a first portion mechanically coupled to the flexible layer and a second portion spaced from the flexible layer and defining a gap therebetween, the reflective element comprising;

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer.

28. The MEMS device of claim 27, wherein the second reflective layer comprises aluminum.

29. The MEMS device of claim 27, wherein the electrically conductive layer comprises aluminum.

30. A microelectromechanical (MEMS) device comprising:

at least one electrode;

a first reflective layer; and

a movable functional element comprising;

a flexible layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer, wherein the flexible layer comprises a flexible dielectric layer; and

a reflective element having a first portion mechanically coupled to the flexible layer and a second portion spaced from the flexible layer and defining a gap therebetween, the reflective element comprising;

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer.

31. The MEMS device of claim 30, wherein the second reflective layer comprises aluminum.

32. The MEMS device of claim 30, wherein the electrically conductive layer comprises aluminum.

33. A microelectromechanical (MEMS) device comprising:

first means for reflecting;

means for moving a portion of the device, the moving means comprising;

second means for reflecting, the second reflecting means including a dielectric portion; and

means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween, wherein the supporting means comprises a flexible dielectric layer; and

means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means.

34. The MEMS device of claim 33, wherein the first reflecting means comprises a first reflective layer.

35. The MEMS device of claim 33, wherein the moving means comprises a movable functional element.

36. The MEMS device of claim 33, wherein the second reflecting means comprises a reflective element comprising:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer.

37. The MEMS device of claim 33, wherein the actuating means comprises at least one electrode.

38. A microelectromechanical (MEMS) device comprising:

first means for reflecting;

means for moving a portion of the device, the moving means comprising;

second means for reflecting, the second reflecting means including a dielectric portion; and

means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween, wherein the supporting means comprises a layer of nickel; and

means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means.

39. The MEMS device of claim 38, wherein the first reflecting means comprises a first reflective layer.

40. The MEMS device of claim 38, wherein the moving means comprises a movable functional element.

41. The MEMS device of claim 38, wherein the second reflecting means comprises a reflective element comprising:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer.

42. The MEMS device of claim 38, wherein the actuating means comprises at least one electrode.